Synthesis of C and N Based Thin Films by Microwave Plasma Chemical Vapor Deposition
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[1] R. Ramamurti,et al. Synthesis of Nanocrystalline Diamond Films by Microwave Plasma CVD , 2012 .
[2] Y. Sakamoto,et al. Fabrication of nitrogen included carbon materials using microwave plasma CVD , 2003 .
[3] Chang Q. Sun,et al. From diamond to crystalline silicon carbonitride: effect of introduction of nitrogen in CH4/H2 gas mixture using MW-PECVD , 2002 .
[4] Hongjun Gao,et al. Structure studies of C3N4 thin films prepared by microwave plasma chemical vapour deposition , 2001 .
[5] Y. Gu,et al. On the structure and composition of crystalline carbon nitride films synthesized by microwave plasma chemical vapor deposition , 2000 .
[6] Longyan Yuan,et al. Scanning tunneling microscopy investigation of carbon nitride thin films grown by microwave plasma chemical vapor deposition , 1999 .
[7] Kuei-Hsien Chen,et al. Crystalline silicon carbon nitride: A wide band gap semiconductor , 1998 .
[8] D. J. Johnson,et al. Deposition of carbon nitride via hot filament assisted CVD and pulsed laser deposition , 1997 .
[9] C. Lieber,et al. Phases and physical properties of carbon nitride thin films prepared by pulsed laser deposition , 1996 .
[10] C. Chou,et al. Growth and characterization of carbon nitride thin films prepared by arc‐plasma jet chemical vapor deposition , 1995 .
[11] A. Liu,et al. Prediction of New Low Compressibility Solids , 1989, Science.