Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning
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[1] R. Muller,et al. Optoelectronic packaging using silicon surface-micromachined alignment mirrors , 1995, IEEE Photonics Technology Letters.
[2] Kristofer S. J. Pister,et al. Micro-machined three-dimensional micro-optics for integrated free-space optical system , 1994, IEEE Photonics Technology Letters.
[3] J. A. Walker,et al. Fabrication of a mechanical antireflection switch for fiber-to-the-home systems , 1996 .
[4] Meng Hsiung,et al. Design and Fabrication of High-Performance Silicon Micromachined Resonant Microscanners for Optical Scanning Applications , 1996 .
[5] Kam Y. Lau,et al. Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.
[6] F. Merat,et al. Diffraction grating scanners using polysilicon micromotors , 1995 .
[7] F. Merat,et al. THE DEVELOPMENT OF POLYSILICON MICROMOTORS FOR OPTICAL SCANNING APPLICATIONS , 1999 .
[8] Kurt E. Petersen,et al. Silicon Torsional Scanning Mirror , 1980, IBM J. Res. Dev..
[9] N. F. de Rooij,et al. Line-Addressable Torsional Micromirrors for Light Modulator Arrays , 1994 .
[10] S. Wakabayashi,et al. Two Dimensional Silicon Micromachined Optical Scanner Integrated With Photo Detector And Piezoresistor , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
[11] Meng-Hsiung Kiang,et al. Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers , 1996, IEEE Photonics Technology Letters.
[12] Jürgen Brugger,et al. Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminum , 1994 .
[13] K.Y. Lau,et al. Micromachined polysilicon microscanners for barcode readers , 1996, IEEE Photonics Technology Letters.
[14] Larry J. Hornbeck,et al. Deformable-Mirror Spatial Light Modulators , 1990, Optics & Photonics.
[15] R. Muller,et al. Laser-to-fiber coupling module using a micromachined alignment mirror , 1995, IEEE Photonics Technology Letters.
[16] O. Solgaard,et al. Deformable grating optical modulator. , 1992, Optics letters.
[17] K.E. Petersen,et al. Silicon as a mechanical material , 1982, Proceedings of the IEEE.
[18] M.C. Wu,et al. Out-of-plane refractive microlens fabricated by surface micromachining , 1996, IEEE Photonics Technology Letters.