论文信息 - Nondestructive Testing of Thin Films by Harmonic Generation of Dispersive Rayleigh Waves

Nondestructive Testing of Thin Films by Harmonic Generation of Dispersive Rayleigh Waves

A new and sensitive measurement technique of determining elastic properties of a thin film on a substrate based on harmonic generation of dispersive Rayleigh waves is demonstrated. The technique has a sensitivity of detecting a change of 0.001% in velocity due to the loading of the thin film. A damaged layer of about 20 A on a mechanically polished LiNbO3 substrate is detectable.

E. Lean | C. G. Powell | C. Powell | Eric Gung-Hwa Lean

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