论文信息 - Study of structural and electrical properties of ferroelectric HZO films obtained by single-target sputtering - 字舞流文

Study of structural and electrical properties of ferroelectric HZO films obtained by single-target sputtering

S. Basrour | V. Consonni | A. Bsiesy | A. Garraud | H. Roussel | G. Lefévre | S. Labau | M. Hachemi | B. Salem