Towards alternative 3D nanofabrication in macroscopic working volumes

[1]  Konstantin K. Likharev,et al.  Coulomb blockade of single-electron tunneling, and coherent oscillations in small tunnel junctions , 1986 .

[2]  Johann Reger,et al.  Robust output feedback trajectory tracking control of an electrodynamic planar motion stage for precision positioning , 2013, 2013 18th International Conference on Methods & Models in Automation & Robotics (MMAR).

[3]  R. Brunner,et al.  Flexible mask illumination setup for serial multipatterning in Talbot lithography. , 2014, Applied optics.

[4]  Mervyn E Jones,et al.  Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions , 2018, Advanced Lithography.

[5]  J. Crain,et al.  Electronically Induced Atom Motion in Engineered CoCun Nanostructures , 2006, Science.

[6]  Tino Hausotte,et al.  Surface and coordinate measurements with nanomeasuring machines , 2012 .

[7]  R. Blaikie,et al.  Evanescent interferometric lithography. , 2001, Applied Optics.

[8]  Vladimir Oliker,et al.  Optical design of freeform two-mirror beam-shaping systems. , 2007, Journal of the Optical Society of America. A, Optics, image science, and vision.

[9]  Rostyslav Dr.-Ing. Mastylo Optische und taktile Nanosensoren auf der Grundlage des Fokusverfahrens für die Anwendung in Nanopositionier- und Nanomessmaschinen , 2012 .

[10]  Eberhard Manske,et al.  Ongoing trends in precision metrology, particularly in nanopositioning and nanomeasuring technology , 2015 .

[11]  Eberhard Manske,et al.  Multi-component force measurement in micromachining , 2017 .

[12]  Ampere A. Tseng Tip-Based Nanofabrication , 2011 .

[13]  Stefan Sinzinger,et al.  Hybrid optical (freeform) components--functionalization of nonplanar optical surfaces by direct picosecond laser ablation. , 2011, Applied optics.

[14]  Ampere A. Tseng,et al.  Advancements and challenges in development of atomic force microscopy for nanofabrication , 2011 .

[15]  B. E. Alaca,et al.  Selective Pattern Transfer of Nano-Scale Features Generated by FE-SPL in 10 nm Thick Resist Layers , 2018 .

[16]  Ivo W. Rangelow,et al.  Scanning probe lithography approach for beyond CMOS devices , 2013, Advanced Lithography.

[18]  Uwe Brand,et al.  Report on the first international comparison of small force facilities: a pilot study at the micronewton level , 2012 .

[19]  Joseph A. Stroscio,et al.  Controlling the Dynamics of a Single Atom in Lateral Atom Manipulation , 2004, Science.

[20]  Johann Reger,et al.  On flatness based L1 adaptive trajectory tracking control , 2014, 2014 IEEE Conference on Control Applications (CCA).

[21]  Eberhard Manske,et al.  Determination of force to displacement curves using a nanopositioning system based on electromagnetic force compensated balances , 2014 .

[22]  Elshad Guliyev,et al.  Electric field scanning probe lithography on molecular glass resists using self-actuating, self-sensing cantilever , 2014, Advanced Lithography.

[23]  Roland Füßl,et al.  Messunsicherheitsanalyse von Nanopositionier- und Nanomessmaschinen mit Hilfe eines neuen vektoriellen Modellansatzes (Analysis of the Measurement Uncertainties of Nanopositioning and Nanomeasuring Machines (NPM-Machines) by Means of a New Vectorial Model Approach) , 2006 .

[24]  R. Füßl,et al.  Uncertainty consideration of the mirror-interferometer system in nanopositioning and nanomeasuring machines , 2008, Optical Engineering + Applications.

[25]  T. Fröhlich,et al.  High-precision horizontally directed force measurements for high dead loads based on a differential electromagnetic force compensation system , 2016 .

[26]  Ivo W. Rangelow,et al.  Nanoprobe maskless lithography , 2010, Advanced Lithography.

[27]  Teodor Gotszalk,et al.  Pattern-generation and pattern-transfer for single-digit nano devices , 2016 .

[28]  Robert Brunner,et al.  New solutions to realize complex optical systems by a combination of diffractive and refractive optical components , 2003, SPIE Optics + Photonics.

[29]  Stefan Sinzinger,et al.  MOEMS tunable microlens made of aluminum nitride membranes , 2013 .

[30]  Stefan Sinzinger,et al.  Chromatic confocal matrix sensor with actuated pinhole arrays. , 2015, Applied optics.

[31]  J Alexander Liddle,et al.  Quantum-dot fluorescence lifetime engineering with DNA origami constructs. , 2013, Angewandte Chemie.

[32]  S. Sinzinger,et al.  Application of an interferometric phase contrast method to fabricate arbitrary diffractive optical elements. , 2008, Applied optics.

[33]  W. Kang,et al.  A study of diamond field emission using micro-patterned monolithic diamond tips with different sp2 contents , 1997 .

[34]  Teodor Gotszalk,et al.  Scanning proximal probes for parallel imaging and lithography , 2008 .

[35]  Eberhard Manske,et al.  A focus sensor for an application in a nanopositioning and nanomeasuring machine , 2005, SPIE Optical Metrology.

[36]  Stefan Sinzinger,et al.  Parabasal theory for plane-symmetric systems including freeform surfaces , 2013 .

[37]  Ivo W. Rangelow,et al.  Scanning proximity probes for nanoscience and nanofabrication , 2006 .

[38]  K. Thompson,et al.  Theory of aberration fields for general optical systems with freeform surfaces. , 2014, Optics express.

[39]  Robert Schmitt,et al.  TECHNICAL DESIGN NOTE: Focus sensor with integrated high-range slope measurement , 2009 .

[40]  W. Schomburg,et al.  Review on ultrasonic fabrication of polymer micro devices. , 2015, Ultrasonics.

[41]  Jürgen Jahns,et al.  Planar packaging of free-space optical interconnections , 1994, Proc. IEEE.

[42]  I. Rangelow,et al.  Review of scanning probe micromachining and its applications within nanoscience , 2014 .

[43]  Thomas W. Kenny,et al.  Tip-based nanofabrication: an approach to true nanotechnology , 2011, Defense + Commercial Sensing.

[44]  Hsuen‐Li Chen,et al.  Nanoimprint technology for patterning functional materials and its applications , 2015 .

[45]  Patrick Mueller,et al.  3D direct laser writing using a 405  nm diode laser. , 2014, Optics letters.

[46]  Eberhard Manske,et al.  Multifunctional nanoanalytics and long-range scanning probe microscope using a nanopositioning and nanomeasuring machine , 2014 .

[47]  Johann Reger,et al.  Developing an IIR robust adaptive algorithm in the modified Filtered-x RLS form for active noise and vibration control systems , 2011, IEEE Conference on Decision and Control and European Control Conference.

[48]  M. Eickhoff,et al.  Integration of an opto-chemical detector based on group III-nitride nanowire heterostructures. , 2015, Applied optics.

[49]  Jan Schleichert,et al.  Dynamische Kalibrierung eines Mehrkomponentensensors für Kraft und Drehmoment , 2016 .

[50]  Martin Wegener,et al.  Towards diffraction-unlimited three-dimensional laser lithography , 2012 .

[51]  Johann Reger,et al.  Discrete-time AUV tracking controller design based on disturbance rejection and dynamic trajectory planning , 2013, 2013 MTS/IEEE OCEANS - Bergen.

[52]  R. Henselmans Non-contact measurement machine for freeform optics , 2005 .

[53]  E. Dobisz,et al.  Sub‐30 nm lithography in a negative electron beam resist with a vacuum scanning tunneling microscope , 1991 .

[54]  A. Yariv,et al.  Holographic interference lithography for integrated optics , 1978, IEEE Transactions on Electron Devices.

[55]  Christian Rudolf,et al.  6D planar magnetic levitation system - PIMag 6D , 2016 .

[56]  M. Kaestner,et al.  Multi-step Scanning Probe Lithography (SPL) on calixarene with overlay alignment , 2012, Advanced Lithography.

[57]  Johann Reger,et al.  Real-Time Spot Detection and Ordering for a Shack–Hartmann Wavefront Sensor With a Low-Cost FPGA , 2014, IEEE Transactions on Instrumentation and Measurement.

[58]  Bryan Kibble,et al.  A Realization of the SI Watt by the NPL Moving-coil Balance , 1990 .

[59]  L Z Cai,et al.  Formation of three-dimensional periodic microstructures by interference of four noncoplanar beams. , 2002, Journal of the Optical Society of America. A, Optics, image science, and vision.

[60]  Johann Reger,et al.  Finite-time simultaneous parameter and state estimation using modulating functions , 2015, 2015 IEEE Conference on Control Applications (CCA).

[61]  Harald Ries,et al.  Tailored freeform optical surfaces. , 2002, Journal of the Optical Society of America. A, Optics, image science, and vision.

[63]  Stefan Sinzinger,et al.  Hybrid hyperchromats for chromatic confocal sensor systems , 2012 .

[64]  Axel Wiegmann,et al.  Entwicklung von Normalen für die Charakterisierung von Asphären-Messgeräten , 2014 .

[65]  T. Hausotte,et al.  Recent developments and challenges of nanopositioning and nanomeasuring technology , 2012 .

[66]  Jon R. Pratt,et al.  Review of SI traceable force metrology for instrumented indentation and atomic force microscopy , 2005 .

[67]  Ivo W. Rangelow,et al.  Scanning proximal probe lithography for sub-10 nm resolution on calix[4]resorcinarene , 2011 .

[68]  Ivo W. Rangelow,et al.  0.1-nanometer resolution positioning stage for sub-10 nm scanning probe lithography , 2013, Advanced Lithography.

[69]  Jannick P. Rolland,et al.  Freeform Optical Surfaces: A Revolution in Imaging Optical Design , 2012 .

[70]  Gotszalk,et al.  Piezoresistive sensors for scanning probe microscopy , 2000, Ultramicroscopy.

[71]  T. P. Chen,et al.  Recent developments in tip-based nanofabrication and its roadmap. , 2008, Journal of nanoscience and nanotechnology.

[72]  Gregg M. Gallatin,et al.  Nanomanufacturing with DNA Origami: Factors Affecting the Kinetics and Yield of Quantum Dot Binding , 2012 .

[73]  Boris N. Chichkov,et al.  Development of functional sub-100 nm structures with 3D two-photon polymerization technique and optical methods for characterization , 2012 .

[74]  Perturbed Talbot patterns for the measurement of low particle concentrations in fluids. , 2012, Applied optics.

[75]  Eberhard Manske,et al.  Multisensor technology based on a laser focus probe for nanomeasuring applications over large areas , 2011, Optical Metrology.

[76]  Guy M Burrow,et al.  Pattern-integrated interference [Invited]. , 2013, Applied optics.

[77]  Michel Despont,et al.  Rapid turnaround scanning probe nanolithography , 2011, Nanotechnology.

[78]  J. Fischer,et al.  Three‐dimensional optical laser lithography beyond the diffraction limit , 2013 .

[79]  Christoph Ament,et al.  Linearized control of an uniaxial micromirror with electrostatic parallel-plate actuation , 2016 .

[80]  Teodor Gotszalk,et al.  Parallel SPM cantilever arrays for large area surface metrology and lithography , 2014, Advanced Lithography.

[82]  A. Oeder,et al.  Optimized free-form optical trapping systems. , 2012, Optics letters.

[83]  R. V. Martinez,et al.  Silicon nanowire transistor with a channel width of 4 nm fabricated by atomic force microscope nanolithography , 2009, 2009 9th IEEE Conference on Nanotechnology (IEEE-NANO).

[84]  M. Miles,et al.  Real-time nanofabrication with high-speed atomic force microscopy , 2009, Nanotechnology.

[85]  Johann Reger,et al.  Modeling of a planar motion stage for precision positioning , 2013, 2013 18th International Conference on Methods & Models in Automation & Robotics (MMAR).

[86]  Yon-Kyu Park,et al.  SI-traceable determination of spring constants of various atomic force microscope cantilevers with a small uncertainty of 1% , 2007 .

[87]  Kira Barton,et al.  Large dynamic range nanopositioning using iterative learning control , 2014 .

[88]  Jan Schleichert,et al.  Mehrkomponenten-Kraft- und -Drehmomentsensor nach dem Prinzip der elektromagnetischen Kompensation , 2016 .

[89]  Pieter Brandt,et al.  Comparison between e-beam direct write and immersion lithography for 20-nm node , 2015 .

[90]  J Alexander Liddle,et al.  Quantum dot-DNA origami binding: a single particle, 3D, real-time tracking study. , 2013, Chemical communications.

[91]  J Alexander Liddle,et al.  Multiple electrokinetic actuators for feedback control of colloidal crystal size. , 2012, Lab on a chip.

[92]  Philipp Mensch,et al.  Sub 20 nm Silicon Patterning and Metal Lift-Off Using Thermal Scanning Probe Lithography , 2014, 1411.4833.

[93]  S. Sinzinger,et al.  Phase contrast imaging: a generalized perspective. , 2009, Journal of the Optical Society of America. A, Optics, image science, and vision.

[94]  Stefan Sinzinger,et al.  Aberration analysis of optimized Alvarez-Lohmann lenses. , 2014, Applied optics.

[95]  Stefan Sinzinger,et al.  2D stepping drive for hyperspectral systems , 2015 .

[96]  Valentyn Ishchuk,et al.  Advanced electric-field scanning probe lithography on molecular resist using active cantilever , 2015 .

[97]  N. Sarkar,et al.  Atomically-precise three-dimensional top down fabrication , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[98]  S. Hampl,et al.  AlN-based piezoelectric bimorph microgenerator utilizing low-level non-resonant excitation , 2011, Microtechnologies.

[99]  D. Allee,et al.  Ambient scanning tunneling lithography of Langmuir–Blodgett and self‐assembled monolayers , 1995 .

[100]  Michael Katzschmann,et al.  Design and performance evaluation of an interferometric controlled planar nanopositioning system , 2012 .

[101]  Martin Hoffmann,et al.  Design and characterization of a resonant triaxial microprobe , 2015 .

[102]  Christoph Ament,et al.  Vergleich der Scan-Performance bei Nanopositioniersystemen mit großem Bewegungsbereich , 2014 .