Towards alternative 3D nanofabrication in macroscopic working volumes
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S Sinzinger | I. Rangelow | T. Fröhlich | S. Sinzinger | E. Manske | R. Füßl | J. Reger | M. Kühnel | Jens-Peter Zöllner | M Kühnel | E Manske | T Fröhlich | R Füßl | M Hoffmann | I W Rangelow | J Reger | C Schäffel | J-P Zöllner | M. Hoffmann | C. Schäffel | I. Rangelow | M. Hoffmann | T. Frohlich
[1] Konstantin K. Likharev,et al. Coulomb blockade of single-electron tunneling, and coherent oscillations in small tunnel junctions , 1986 .
[2] Johann Reger,et al. Robust output feedback trajectory tracking control of an electrodynamic planar motion stage for precision positioning , 2013, 2013 18th International Conference on Methods & Models in Automation & Robotics (MMAR).
[3] R. Brunner,et al. Flexible mask illumination setup for serial multipatterning in Talbot lithography. , 2014, Applied optics.
[4] Mervyn E Jones,et al. Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions , 2018, Advanced Lithography.
[5] J. Crain,et al. Electronically Induced Atom Motion in Engineered CoCun Nanostructures , 2006, Science.
[6] Tino Hausotte,et al. Surface and coordinate measurements with nanomeasuring machines , 2012 .
[7] R. Blaikie,et al. Evanescent interferometric lithography. , 2001, Applied Optics.
[8] Vladimir Oliker,et al. Optical design of freeform two-mirror beam-shaping systems. , 2007, Journal of the Optical Society of America. A, Optics, image science, and vision.
[9] Rostyslav Dr.-Ing. Mastylo. Optische und taktile Nanosensoren auf der Grundlage des Fokusverfahrens für die Anwendung in Nanopositionier- und Nanomessmaschinen , 2012 .
[10] Eberhard Manske,et al. Ongoing trends in precision metrology, particularly in nanopositioning and nanomeasuring technology , 2015 .
[11] Eberhard Manske,et al. Multi-component force measurement in micromachining , 2017 .
[12] Ampere A. Tseng. Tip-Based Nanofabrication , 2011 .
[13] Stefan Sinzinger,et al. Hybrid optical (freeform) components--functionalization of nonplanar optical surfaces by direct picosecond laser ablation. , 2011, Applied optics.
[14] Ampere A. Tseng,et al. Advancements and challenges in development of atomic force microscopy for nanofabrication , 2011 .
[15] B. E. Alaca,et al. Selective Pattern Transfer of Nano-Scale Features Generated by FE-SPL in 10 nm Thick Resist Layers , 2018 .
[16] Ivo W. Rangelow,et al. Scanning probe lithography approach for beyond CMOS devices , 2013, Advanced Lithography.
[18] Uwe Brand,et al. Report on the first international comparison of small force facilities: a pilot study at the micronewton level , 2012 .
[19] Joseph A. Stroscio,et al. Controlling the Dynamics of a Single Atom in Lateral Atom Manipulation , 2004, Science.
[20] Johann Reger,et al. On flatness based L1 adaptive trajectory tracking control , 2014, 2014 IEEE Conference on Control Applications (CCA).
[21] Eberhard Manske,et al. Determination of force to displacement curves using a nanopositioning system based on electromagnetic force compensated balances , 2014 .
[22] Elshad Guliyev,et al. Electric field scanning probe lithography on molecular glass resists using self-actuating, self-sensing cantilever , 2014, Advanced Lithography.
[23] Roland Füßl,et al. Messunsicherheitsanalyse von Nanopositionier- und Nanomessmaschinen mit Hilfe eines neuen vektoriellen Modellansatzes (Analysis of the Measurement Uncertainties of Nanopositioning and Nanomeasuring Machines (NPM-Machines) by Means of a New Vectorial Model Approach) , 2006 .
[24] R. Füßl,et al. Uncertainty consideration of the mirror-interferometer system in nanopositioning and nanomeasuring machines , 2008, Optical Engineering + Applications.
[25] T. Fröhlich,et al. High-precision horizontally directed force measurements for high dead loads based on a differential electromagnetic force compensation system , 2016 .
[26] Ivo W. Rangelow,et al. Nanoprobe maskless lithography , 2010, Advanced Lithography.
[27] Teodor Gotszalk,et al. Pattern-generation and pattern-transfer for single-digit nano devices , 2016 .
[28] Robert Brunner,et al. New solutions to realize complex optical systems by a combination of diffractive and refractive optical components , 2003, SPIE Optics + Photonics.
[29] Stefan Sinzinger,et al. MOEMS tunable microlens made of aluminum nitride membranes , 2013 .
[30] Stefan Sinzinger,et al. Chromatic confocal matrix sensor with actuated pinhole arrays. , 2015, Applied optics.
[31] J Alexander Liddle,et al. Quantum-dot fluorescence lifetime engineering with DNA origami constructs. , 2013, Angewandte Chemie.
[32] S. Sinzinger,et al. Application of an interferometric phase contrast method to fabricate arbitrary diffractive optical elements. , 2008, Applied optics.
[33] W. Kang,et al. A study of diamond field emission using micro-patterned monolithic diamond tips with different sp2 contents , 1997 .
[34] Teodor Gotszalk,et al. Scanning proximal probes for parallel imaging and lithography , 2008 .
[35] Eberhard Manske,et al. A focus sensor for an application in a nanopositioning and nanomeasuring machine , 2005, SPIE Optical Metrology.
[36] Stefan Sinzinger,et al. Parabasal theory for plane-symmetric systems including freeform surfaces , 2013 .
[37] Ivo W. Rangelow,et al. Scanning proximity probes for nanoscience and nanofabrication , 2006 .
[38] K. Thompson,et al. Theory of aberration fields for general optical systems with freeform surfaces. , 2014, Optics express.
[39] Robert Schmitt,et al. TECHNICAL DESIGN NOTE: Focus sensor with integrated high-range slope measurement , 2009 .
[40] W. Schomburg,et al. Review on ultrasonic fabrication of polymer micro devices. , 2015, Ultrasonics.
[41] Jürgen Jahns,et al. Planar packaging of free-space optical interconnections , 1994, Proc. IEEE.
[42] I. Rangelow,et al. Review of scanning probe micromachining and its applications within nanoscience , 2014 .
[43] Thomas W. Kenny,et al. Tip-based nanofabrication: an approach to true nanotechnology , 2011, Defense + Commercial Sensing.
[44] Hsuen‐Li Chen,et al. Nanoimprint technology for patterning functional materials and its applications , 2015 .
[45] Patrick Mueller,et al. 3D direct laser writing using a 405 nm diode laser. , 2014, Optics letters.
[46] Eberhard Manske,et al. Multifunctional nanoanalytics and long-range scanning probe microscope using a nanopositioning and nanomeasuring machine , 2014 .
[47] Johann Reger,et al. Developing an IIR robust adaptive algorithm in the modified Filtered-x RLS form for active noise and vibration control systems , 2011, IEEE Conference on Decision and Control and European Control Conference.
[48] M. Eickhoff,et al. Integration of an opto-chemical detector based on group III-nitride nanowire heterostructures. , 2015, Applied optics.
[49] Jan Schleichert,et al. Dynamische Kalibrierung eines Mehrkomponentensensors für Kraft und Drehmoment , 2016 .
[50] Martin Wegener,et al. Towards diffraction-unlimited three-dimensional laser lithography , 2012 .
[51] Johann Reger,et al. Discrete-time AUV tracking controller design based on disturbance rejection and dynamic trajectory planning , 2013, 2013 MTS/IEEE OCEANS - Bergen.
[52] R. Henselmans. Non-contact measurement machine for freeform optics , 2005 .
[53] E. Dobisz,et al. Sub‐30 nm lithography in a negative electron beam resist with a vacuum scanning tunneling microscope , 1991 .
[54] A. Yariv,et al. Holographic interference lithography for integrated optics , 1978, IEEE Transactions on Electron Devices.
[55] Christian Rudolf,et al. 6D planar magnetic levitation system - PIMag 6D , 2016 .
[56] M. Kaestner,et al. Multi-step Scanning Probe Lithography (SPL) on calixarene with overlay alignment , 2012, Advanced Lithography.
[57] Johann Reger,et al. Real-Time Spot Detection and Ordering for a Shack–Hartmann Wavefront Sensor With a Low-Cost FPGA , 2014, IEEE Transactions on Instrumentation and Measurement.
[58] Bryan Kibble,et al. A Realization of the SI Watt by the NPL Moving-coil Balance , 1990 .
[59] L Z Cai,et al. Formation of three-dimensional periodic microstructures by interference of four noncoplanar beams. , 2002, Journal of the Optical Society of America. A, Optics, image science, and vision.
[60] Johann Reger,et al. Finite-time simultaneous parameter and state estimation using modulating functions , 2015, 2015 IEEE Conference on Control Applications (CCA).
[61] Harald Ries,et al. Tailored freeform optical surfaces. , 2002, Journal of the Optical Society of America. A, Optics, image science, and vision.
[63] Stefan Sinzinger,et al. Hybrid hyperchromats for chromatic confocal sensor systems , 2012 .
[64] Axel Wiegmann,et al. Entwicklung von Normalen für die Charakterisierung von Asphären-Messgeräten , 2014 .
[65] T. Hausotte,et al. Recent developments and challenges of nanopositioning and nanomeasuring technology , 2012 .
[66] Jon R. Pratt,et al. Review of SI traceable force metrology for instrumented indentation and atomic force microscopy , 2005 .
[67] Ivo W. Rangelow,et al. Scanning proximal probe lithography for sub-10 nm resolution on calix[4]resorcinarene , 2011 .
[68] Ivo W. Rangelow,et al. 0.1-nanometer resolution positioning stage for sub-10 nm scanning probe lithography , 2013, Advanced Lithography.
[69] Jannick P. Rolland,et al. Freeform Optical Surfaces: A Revolution in Imaging Optical Design , 2012 .
[70] Gotszalk,et al. Piezoresistive sensors for scanning probe microscopy , 2000, Ultramicroscopy.
[71] T. P. Chen,et al. Recent developments in tip-based nanofabrication and its roadmap. , 2008, Journal of nanoscience and nanotechnology.
[72] Gregg M. Gallatin,et al. Nanomanufacturing with DNA Origami: Factors Affecting the Kinetics and Yield of Quantum Dot Binding , 2012 .
[73] Boris N. Chichkov,et al. Development of functional sub-100 nm structures with 3D two-photon polymerization technique and optical methods for characterization , 2012 .
[74] Perturbed Talbot patterns for the measurement of low particle concentrations in fluids. , 2012, Applied optics.
[75] Eberhard Manske,et al. Multisensor technology based on a laser focus probe for nanomeasuring applications over large areas , 2011, Optical Metrology.
[76] Guy M Burrow,et al. Pattern-integrated interference [Invited]. , 2013, Applied optics.
[77] Michel Despont,et al. Rapid turnaround scanning probe nanolithography , 2011, Nanotechnology.
[78] J. Fischer,et al. Three‐dimensional optical laser lithography beyond the diffraction limit , 2013 .
[79] Christoph Ament,et al. Linearized control of an uniaxial micromirror with electrostatic parallel-plate actuation , 2016 .
[80] Teodor Gotszalk,et al. Parallel SPM cantilever arrays for large area surface metrology and lithography , 2014, Advanced Lithography.
[82] A. Oeder,et al. Optimized free-form optical trapping systems. , 2012, Optics letters.
[83] R. V. Martinez,et al. Silicon nanowire transistor with a channel width of 4 nm fabricated by atomic force microscope nanolithography , 2009, 2009 9th IEEE Conference on Nanotechnology (IEEE-NANO).
[84] M. Miles,et al. Real-time nanofabrication with high-speed atomic force microscopy , 2009, Nanotechnology.
[85] Johann Reger,et al. Modeling of a planar motion stage for precision positioning , 2013, 2013 18th International Conference on Methods & Models in Automation & Robotics (MMAR).
[86] Yon-Kyu Park,et al. SI-traceable determination of spring constants of various atomic force microscope cantilevers with a small uncertainty of 1% , 2007 .
[87] Kira Barton,et al. Large dynamic range nanopositioning using iterative learning control , 2014 .
[88] Jan Schleichert,et al. Mehrkomponenten-Kraft- und -Drehmomentsensor nach dem Prinzip der elektromagnetischen Kompensation , 2016 .
[89] Pieter Brandt,et al. Comparison between e-beam direct write and immersion lithography for 20-nm node , 2015 .
[90] J Alexander Liddle,et al. Quantum dot-DNA origami binding: a single particle, 3D, real-time tracking study. , 2013, Chemical communications.
[91] J Alexander Liddle,et al. Multiple electrokinetic actuators for feedback control of colloidal crystal size. , 2012, Lab on a chip.
[92] Philipp Mensch,et al. Sub 20 nm Silicon Patterning and Metal Lift-Off Using Thermal Scanning Probe Lithography , 2014, 1411.4833.
[93] S. Sinzinger,et al. Phase contrast imaging: a generalized perspective. , 2009, Journal of the Optical Society of America. A, Optics, image science, and vision.
[94] Stefan Sinzinger,et al. Aberration analysis of optimized Alvarez-Lohmann lenses. , 2014, Applied optics.
[95] Stefan Sinzinger,et al. 2D stepping drive for hyperspectral systems , 2015 .
[96] Valentyn Ishchuk,et al. Advanced electric-field scanning probe lithography on molecular resist using active cantilever , 2015 .
[97] N. Sarkar,et al. Atomically-precise three-dimensional top down fabrication , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
[98] S. Hampl,et al. AlN-based piezoelectric bimorph microgenerator utilizing low-level non-resonant excitation , 2011, Microtechnologies.
[99] D. Allee,et al. Ambient scanning tunneling lithography of Langmuir–Blodgett and self‐assembled monolayers , 1995 .
[100] Michael Katzschmann,et al. Design and performance evaluation of an interferometric controlled planar nanopositioning system , 2012 .
[101] Martin Hoffmann,et al. Design and characterization of a resonant triaxial microprobe , 2015 .
[102] Christoph Ament,et al. Vergleich der Scan-Performance bei Nanopositioniersystemen mit großem Bewegungsbereich , 2014 .