论文信息 - RF CMOS-MEMS Switch with Low-Voltage Operation for Single-Chip RF LSIs

RF CMOS-MEMS Switch with Low-Voltage Operation for Single-Chip RF LSIs

This paper describes a novel RF CMOS-MEMS switch that integrates RF MEMS switches and CMOS control circuits. A single-pole 8-through RF CMOS-MEMS switch was fabricated and its operation at 3.3 V supply voltage was achieved. The switch was encapsulated with a thin film at wafer level to prevent destruction during packaging. Experimental results confirm that the switch has mechanical reliability for more than 1 billion cycles

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