Integrated optical differential pressure transducers achieved using thin buckled silica membranes and direct UV written planar Bragg gratings

Abstract Direct UV written differential pressure sensors have been fabricated in a silica-on-silicon platform. The reported components achieve physical sensitivity through actuating planar Bragg gratings defined within a thin (

[1]  John P. Dakin,et al.  FIBRE GRATING PRESSURE SENSOR WITH ENHANCED SENSITIVITY USING A GLASS-BUBBLE HOUSING , 1996 .

[2]  Christopher Holmes,et al.  Quantifying the optical sensitivity of planar Bragg gratings in glass micro-cantilevers to physical deflection , 2011 .

[3]  Ludmila Eckertova,et al.  Physics of thin films , 1977 .

[4]  Fang Li,et al.  Fiber Bragg grating pressure sensor with ultrahigh sensitivity and reduced temperature sensitivity , 2009 .

[5]  M. Ohring.  The Materials Science of Thin Films , 1991 .

[6]  P. Norlin,et al.  A chemical micro analysis system for measurement of pressure, flow rate, temperature, conductivity, UV-absorption and fluorescence , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[7]  Takashi Sato,et al.  Feasibility of a Silicon-Based Guided-Wave Optical Microphone , 2008 .

[8]  Said I. Abdel-Khalik,et al.  A microfluidic experimental platform with internal pressure measurements , 2005 .

[9]  Ying Zhang,et al.  High-sensitivity pressure sensor using a shielded polymer-coated fiber Bragg grating , 2001, IEEE Photonics Technology Letters.

[10]  S. Beeby,et al.  MEMS Mechanical Sensors , 2004 .

[11]  Morten Ibsen,et al.  Fabrication of directly UV-written channel waveguides with simultaneously defined integral Bragg gratings , 2002 .

[12]  S. Timoshenko,et al.  THEORY OF PLATES AND SHELLS , 1959 .

[13]  Yanqiu Li,et al.  Membrane‐based fiber Bragg grating pressure sensor with high sensitivity , 2009 .

[14]  Gijsbertus J.M. Krijnen,et al.  A micromachined pressure/flow-sensor , 1999 .

[15]  J. Gates,et al.  Strain tuning of a composite silica-on-silicon direct ultraviolet written planar Bragg grating , 2010 .

[16]  M. Elwenspoek,et al.  Silicon Active Microvalves Using Buckled Membranes For Actuation , 1994, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[17]  W. Wooster,et al.  Photoelastic and Electrooptic Properties of Crystals , 1982 .

[18]  Miko Elwenspoek,et al.  Buckled membranes for microstructures , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

[19]  J. G. Hoffman,et al.  Physics of Thin Films: Advances in Research and Development , 1988 .

[20]  Lin Yuanhui,et al.  フォトレジスト上のパリレンC(POP):ポリマー/金属ナノワイヤ製造のための低温スペーサ技術 , 2011 .

[21]  O. Tabata,et al.  Mechanical property measurements of thin films using load-deflection of composite rectangular membranes , 1989 .

[22]  Sheau-Shong Bor,et al.  High-sensitivity temperature-independent differential pressure sensor using fiber Bragg gratings. , 2008, Optics express.

[23]  Ju-Han Song,et al.  Photonic microphone based on a dual-core multimode fiber head combined with a micromirror diaphragm , 2007 .