A Paper-Based Piezoelectric Accelerometer

This paper presents the design and testing of a one-axis piezoelectric accelerometer made from cellulose paper and piezoelectric zinc oxide nanowires (ZnO NWs) hydrothermally grown on paper. The accelerometer adopts a cantilever-based configuration with two parallel cantilever beams attached with a paper proof mass. A piece of U-shaped, ZnO-NW-coated paper is attached on top of the parallel beams, serving as the strain sensing element for acceleration measurement. The electric charges produced from the ZnO-NW-coated paper are converted into a voltage output using a custom-made charge amplifier circuit. The device fabrication only involves cutting of paper and hydrothermal growth of ZnO NWs, and does not require the access to expensive and sophisticated equipment. The performance of the devices with different weight growth percentages of the ZnO NWs was characterized.

[1]  Srinivas Tadigadapa,et al.  Characterization of viscoelastic properties of adsorbed biomolecules and biomolecular assemblies with high frequency micromachined quartz resonators , 2009 .

[2]  Xiao Li,et al.  A paper-based microfluidic biosensor integrating zinc oxide nanowires for electrochemical glucose detection , 2015, Microsystems & Nanoengineering.

[3]  T. Unander,et al.  Characterization of Printed Moisture Sensors in Packaging Surveillance Applications , 2009, IEEE Sensors Journal.

[4]  Andrew J. Steckl,et al.  Improved Performance of OLEDs on Cellulose/Epoxy Substrate Using Adenine as a Hole Injection Layer , 2015 .

[5]  Jaeyoung Kim,et al.  All-Printed and Roll-to-Roll-Printable 13.56-MHz-Operated 1-bit RF Tag on Plastic Foils , 2010, IEEE Transactions on Electron Devices.

[6]  N D Robinson,et al.  Organic materials for printed electronics. , 2007, Nature materials.

[7]  Yi Cui,et al.  Highly conductive paper for energy-storage devices , 2009, Proceedings of the National Academy of Sciences.

[8]  G. Whitesides,et al.  Paper-based piezoresistive MEMS sensors. , 2011, Lab on a chip.

[9]  Anis Nurashikin Nordin,et al.  Acoustic wave based MEMS devices for biosensing applications. , 2012, Biosensors & bioelectronics.

[10]  A. Steckl,et al.  Three-color electrowetting display device for electronic paper , 2010 .

[11]  Xing Xie,et al.  Paper supercapacitors by a solvent-free drawing method† , 2011 .

[12]  K. Walus,et al.  Flexible and robust hybrid paper with a large piezoelectric coefficient , 2016 .

[13]  Xu Xiao,et al.  Paper-based supercapacitors for self-powered nanosystems. , 2012, Angewandte Chemie.

[14]  Albert P. Pisano,et al.  Surface micromachined piezoelectric accelerometers (PiXLs) , 2001 .

[15]  Peter Wasserscheid,et al.  Cellulose‐Based Ionogels for Paper Electronics , 2014 .

[16]  R. Österbacka,et al.  Paper Electronics , 2011, Advanced materials.

[17]  Weizhen He,et al.  Solution-derived 40 µm vertically aligned ZnO nanowire arrays as photoelectrodes in dye-sensitized solar cells , 2010, Nanotechnology.

[18]  Stephanus Büttgenbach,et al.  Development and application of a miniaturised quartz crystal microbalance (QCM) as immunosensor for bone morphogenetic protein-2 , 2005 .

[19]  Kaushik Balakrishnan,et al.  Flexible ZnO-cellulose nanocomposite for multisource energy conversion. , 2011, Small.

[20]  Seiji Aoyagi,et al.  Surface micromachined accelerometer using ferroelectric substrate , 2007 .

[21]  Xiao Li,et al.  A Microfluidic Paper‐Based Origami Nanobiosensor for Label‐Free, Ultrasensitive Immunoassays , 2016, Advanced healthcare materials.

[22]  Guoqiang Liu,et al.  Flexible piezoelectric nanogenerators based on ZnO nanorods grown on common paper substrates. , 2012, Nanoscale.

[23]  Ali Kemal Yetisen,et al.  Paper-based microfluidic point-of-care diagnostic devices. , 2013, Lab on a chip.

[24]  Yu Wang,et al.  Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers , 2003 .

[25]  Yu-Hsuan Wang,et al.  Flexible physical sensors made from paper substrates integrated with zinc oxide nanostructures , 2017 .

[26]  Xiao Li,et al.  Controllable Hydrothermal Growth of ZnO Nanowires on Cellulose Paper for Flexible Sensors and Electronics , 2015, IEEE Sensors Journal.

[27]  Zhong Lin Wang,et al.  A paper-based nanogenerator as a power source and active sensor , 2013 .

[28]  Di Gao,et al.  Preferential Growth of Long ZnO Nanowire Array and Its Application in Dye-Sensitized Solar Cells , 2010 .

[29]  Shangjr Gwo,et al.  Immobilization of DNA-Au nanoparticles on aminosilane-functionalized aluminum nitride epitaxial films for surface acoustic wave sensing , 2008 .

[30]  E. S. Kim,et al.  Single- and Triaxis Piezoelectric-Bimorph Accelerometers , 2008, Journal of Microelectromechanical Systems.

[31]  Vivek Subramanian,et al.  Printed unmanned aerial vehicles using paper-based electroactive polymer actuators and organic ion gel transistors , 2016, Microsystems & Nanoengineering.

[32]  E. Fortunato,et al.  Complementary Metal Oxide Semiconductor Technology With and On Paper , 2011, Advanced materials.

[33]  Chul-Soo Kim,et al.  Monolithic 1-Chip FBAR duplexer for W-CDMA handsets , 2008 .

[34]  Elecirodes Piezoelectric,et al.  HIGH Q MICROWAVE ACOUSTIC RESONATORS AND FILTERS , 1993 .

[35]  Xiao Li,et al.  Paper-based piezoelectric touch pads with hydrothermally grown zinc oxide nanowires. , 2014, ACS applied materials & interfaces.

[36]  Paul Muralt,et al.  Piezoelectric micromachined ultrasonic transducers with thick PZT sol gel films , 2007 .

[37]  P. Ajayan,et al.  Flexible piezoelectric ZnO-paper nanocomposite strain sensor. , 2010, Small.

[38]  Abdullah Atalar,et al.  Micromachined two-dimensional array piezoelectrically actuated transducers , 1998 .