论文信息 - MMI-reflector: A novel on-chip reflector for photonic integrated circuits

MMI-reflector: A novel on-chip reflector for photonic integrated circuits

We present a novel, compact, on-chip multi-mode interference (MMI) reflector, with near-100% theoretical reflection. We measured 78±10% reflection for an InP-based MMI-reflector fabricated with a single etch step with inductively coupled plasma (ICP) etching technique.

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