The Structural Evolution of Semipolar (11−22) Plane AlN Tem-Plate on m-Plane Sapphire Prepared by Sputtering and High Temperature Annealing
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Fabi Zhang | Zhiwen Liang | Jin Zhang | Shangfeng Liu | Ye Yuan | Lijie Huang | Junjie Kang | Qi Wang | Chen-hui Zhang | W. Luo | Jiakang Cao
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