Characterization of buried photonic crystal waveguides and microcavities fabricated by deep ultraviolet lithography

We present results of the optical characterization of silicon photonic crystal waveguides and microcavities that are completely buried in a silicon dioxide cladding and are fabricated by deep ultraviolet (UV) lithography. The advantages of buried waveguides and deep UV lithography are discussed. Transmission spectra and loss factors for photonic crystal waveguides, as well as quality factors for resonant microcavities, are obtained. The observed characteristics are in good agreement with three-dimensional simulations.

[1]  Philippe Lalanne,et al.  Bloch-wave engineering for high-Q, small-V microcavities , 2003 .

[2]  M. Notomi,et al.  Structural tuning of guiding modes of line-defect waveguides of silicon-on-insulator photonic crystal slabs , 2002 .

[3]  S Mias,et al.  Two physical mechanisms for boosting the quality factor to cavity volume ratio of photonic crystal microcavities. , 2004, Optics express.

[4]  Y. Vlasov,et al.  Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides. , 2003, Optics express.

[5]  P. Dumon,et al.  Basic structures for photonic integrated circuits in Silicon-on-insulator. , 2004, Optics express.

[6]  J. Joannopoulos,et al.  High Transmission through Sharp Bends in Photonic Crystal Waveguides. , 1996, Physical review letters.

[7]  M. Notomi,et al.  Waveguides, resonators and their coupled elements in photonic crystal slabs. , 2004, Optics express.

[8]  H. Haus,et al.  Channel drop filters in photonic crystals. , 1998, Optics express.

[9]  T. Weiland.  Time Domain Electromagnetic Field Computation with Finite Difference Methods , 1996 .

[10]  W. Kuang,et al.  Reducing the out-of-plane radiation loss of photonic crystal waveguides on high-index substrates. , 2004, Optics letters.

[11]  A. Scherer,et al.  Low-Threshold Photonic Crystal Laser , 2002 .

[12]  Philippe Lalanne,et al.  Compound cavity measurement of transmission and reflection of a tapered single-line photonic-crystal waveguide , 2003 .

[13]  P. Lalanne,et al.  Photonic crystal waveguides: Out-of-plane losses and adiabatic modal conversion , 2001 .