Medium-scale carbon nanotube thin-film integrated circuits on flexible plastic substrates

The ability to form integrated circuits on flexible sheets of plastic enables attributes (for example conformal and flexible formats and lightweight and shock resistant construction) in electronic devices that are difficult or impossible to achieve with technologies that use semiconductor wafers or glass plates as substrates. Organic small-molecule and polymer-based materials represent the most widely explored types of semiconductors for such flexible circuitry. Although these materials and those that use films or nanostructures of inorganics have promise for certain applications, existing demonstrations of them in circuits on plastic indicate modest performance characteristics that might restrict the application possibilities. Here we report implementations of a comparatively high-performance carbon-based semiconductor consisting of sub-monolayer, random networks of single-walled carbon nanotubes to yield small- to medium-scale integrated digital circuits, composed of up to nearly 100 transistors on plastic substrates. Transistors in these integrated circuits have excellent properties: mobilities as high as 80 cm2 V-1 s-1, subthreshold slopes as low as 140 m V dec-1, operating voltages less than 5 V together with deterministic control over the threshold voltages, on/off ratios as high as 105, switching speeds in the kilohertz range even for coarse (∼100-μm) device geometries, and good mechanical flexibility—all with levels of uniformity and reproducibility that enable high-yield fabrication of integrated circuits. Theoretical calculations, in contexts ranging from heterogeneous percolative transport through the networks to compact models for the transistors to circuit level simulations, provide quantitative and predictive understanding of these systems. Taken together, these results suggest that sub-monolayer films of single-walled carbon nanotubes are attractive materials for flexible integrated circuits, with many potential areas of application in consumer and other areas of electronics.

[1]  Elliott Philofsky,et al.  Intermetallic formation in gold-aluminum systems , 1970 .

[2]  C. Feger,et al.  Curing studies of a polyimide precursor. II. Polyamic acid , 1987 .

[3]  C. Feger,et al.  Curing studies of a polyimide precursor , 1987 .

[4]  Ron Dagani,et al.  CARBON-BASED ELECTRONICS , 1999 .

[5]  H. Sirringhaus,et al.  High-Resolution Ink-Jet Printing of All-Polymer Transistor Circuits , 2000, Science.

[6]  R. Sarpeshkar,et al.  Large-scale complementary integrated circuits based on organic transistors , 2000, Nature.

[7]  V. R. Raju,et al.  Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks , 2001, Proceedings of the National Academy of Sciences of the United States of America.

[8]  H. Dai,et al.  Growth of Single-Walled Carbon Nanotubes from Discrete Catalytic Nanoparticles of Various Sizes , 2001 .

[9]  Esther Kim,et al.  Atomic Layer Deposition of Hafnium and Zirconium Oxides Using Metal Amide Precursors , 2002 .

[10]  H. Dai,et al.  High-kappa dielectrics for advanced carbon-nanotube transistors and logic gates. , 2002, Nature materials.

[11]  Xiangfeng Duan,et al.  High-performance thin-film transistors using semiconductor nanowires and nanoribbons , 2003, Nature.

[12]  M. Radosavljevic,et al.  Drain voltage scaling in carbon nanotube transistors , 2003, cond-mat/0305570.

[13]  Jean-Christophe P. Gabriel,et al.  Flexible Nanotube Electronics , 2003 .

[14]  Feng Gao,et al.  Large area, high resolution, dry printing of conducting polymers for organic electronics , 2003 .

[15]  M. Lundstrom,et al.  Ballistic carbon nanotube field-effect transistors , 2003, Nature.

[16]  W. Hoenlein,et al.  High-current nanotube transistors , 2004 .

[17]  G. Gelinck,et al.  Flexible active-matrix displays and shift registers based on solution-processed organic transistors , 2004, Nature materials.

[18]  Stephen R. Forrest,et al.  The path to ubiquitous and low-cost organic electronic appliances on plastic , 2004, Nature.

[19]  John A. Rogers,et al.  p-Channel, n-Channel Thin Film Transistors and p−n Diodes Based on Single Wall Carbon Nanotube Networks , 2004 .

[20]  A. Toriumi,et al.  Nanometer-scale crystallization of thin HfO2 films studied by HF-chemical etching , 2005 .

[21]  J. Murthy,et al.  Percolating conduction in finite nanotube networks. , 2005, Physical review letters.

[22]  Mario G. Ancona,et al.  High-mobility Carbon-nanotube Thin-film Transistors on a Polymeric Substrate , 2005 .

[23]  Tobin J Marks,et al.  Low-voltage organic field-effect transistors and inverters enabled by ultrathin cross-linked polymers as gate dielectrics. , 2005, Journal of the American Chemical Society.

[24]  Jie Zhang,et al.  Printed Organic Semiconducting Devices , 2005, Proceedings of the IEEE.

[25]  P. Avouris,et al.  Self-aligned carbon nanotube transistors with charge transfer doping , 2005, cond-mat/0511039.

[26]  T. Someya,et al.  Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes. , 2005, Proceedings of the National Academy of Sciences of the United States of America.

[27]  Robert H. Reuss,et al.  Macroelectronics: Perspectives on Technology and Applications , 2005, Proceedings of the IEEE.

[28]  Paul L. McEuen,et al.  Measurement of the quantum capacitance of interacting electrons in carbon nanotubes , 2006 .

[29]  T. Jackson,et al.  Flexible substrate micro-crystalline silicon and gated amorphous silicon strain sensors , 2006, IEEE Transactions on Electron Devices.

[30]  Niyazi Serdar Sariciftci,et al.  PROGRESS IN PLASTIC ELECTRONICS DEVICES , 2006 .

[31]  A. Rinzler,et al.  An Integrated Logic Circuit Assembled on a Single Carbon Nanotube , 2006, Science.

[32]  M. Shim,et al.  Insights on charge transfer doping and intrinsic phonon line shape of carbon nanotubes by simple polymer adsorption. , 2006, Journal of the American Chemical Society.

[33]  Mark C. Hersam,et al.  Sorting carbon nanotubes by electronic structure using density differentiation , 2006, Nature nanotechnology.

[34]  Yang Yang,et al.  Patterning organic single-crystal transistor arrays , 2006, Nature.

[35]  Viktor Malyarchuk,et al.  Experimental and computational studies of phase shift lithography with binary elastomeric masks , 2006 .

[36]  John A Rogers,et al.  Micro- and nanopatterning techniques for organic electronic and optoelectronic systems. , 2007, Chemical reviews.

[37]  Gate capacitance coupling of singled-walled carbon nanotube thin-film transistors , 2006, cond-mat/0612012.

[38]  Flora M. Li,et al.  Ink-jet printing of carbon nanotube thin film transistors , 2007 .

[39]  Current–Voltage Characteristics of Long-Channel Nanobundle Thin-Film Transistors: A “Bottom-Up” Perspective , 2006, IEEE Electron Device Letters.

[40]  H. Klauk,et al.  Ultralow-power organic complementary circuits , 2007, Nature.

[41]  Henri Happy,et al.  Gigahertz frequency flexible carbon nanotube transistors , 2007 .

[42]  T. Someya,et al.  A large-area wireless power-transmission sheet using printed organic transistors and plastic MEMS switches. , 2007, Nature materials.

[43]  J. Rogers,et al.  High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes. , 2007, Nature nanotechnology.

[44]  J. Rogers,et al.  Experimental and theoretical studies of transport through large scale, partially aligned arrays of single-walled carbon nanotubes in thin film type transistors. , 2007, Nano letters.

[45]  J. Rogers,et al.  Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon , 2008, IEEE Electron Device Letters.

[46]  Theory of the field-effect mobility in amorphous organic transistors , 2008 .