论文信息 - Development of a large area sputter-coating method using a new magnetron discharge - 字舞流文

Development of a large area sputter-coating method using a new magnetron discharge

Y. Matsuda | H. Fujiyama | K. Kuwahara

[1] M. Lieberman,et al. Axial distribution of optical emission in a planar magnetron discharge , 1988 .

[2] S. Maniv. Generalization of the model for the J‐V characteristics of dc sputtering discharges , 1986 .