Recent developments in interferometry for microsystems metrology

Keywords: Digital Holographic Microscopy ; White-Light Interferometry ; Interference Microscopy ; Mems Characterization ; Tv-Holography ; Deformation ; System ; Shape ; Reconstruction ; Microelements Reference IMAC-ARTICLE-2009-013doi:10.1016/j.optlaseng.2008.08.009View record in Web of Science Record created on 2009-02-23, modified on 2016-08-08

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