T-shaped microcantilever sensor with reduced deflection offset

The authors have designed and fabricated arrays of microcantilevers with a geometry that shows reduced initial angular offset and angle deviation between the cantilevers of the array. This feature allows to detect the displacement of the cantilevers using the optical beam deflection technique and a single split photodetector. The structure is analytically and numerically simulated to demonstrate its feasibility. In addition, experimental measurements of the angle offset corroborate the offset and the angle deviation reduction. Finally, they illustrate the potential of these micromechanical structures as sensors by measuring a monolayer of single stranded DNA.

[1]  H. Rothuizen,et al.  Translating biomolecular recognition into nanomechanics. , 2000, Science.

[2]  Javier Tamayo,et al.  Real-time profile of microcantilevers for sensing applications , 2005 .

[3]  Xianfan Xu,et al.  Laser bending for high-precision curvature adjustment of microcantilevers , 2005 .

[4]  S. R. Garner,et al.  Batch fabrication and characterization of ultrasensitive cantilevers with submicron magnetic tips , 2004 .

[5]  M. Sepaniak,et al.  Cantilever transducers as a platform for chemical and biological sensors , 2004 .

[6]  N. Lavrik,et al.  Detection and differentiation of biological species using microcalorimetric spectroscopy. , 2003, Ultramicroscopy.

[7]  T. Kenny,et al.  Quality factors in micron- and submicron-thick cantilevers , 2000, Journal of Microelectromechanical Systems.

[8]  A. Majumdar,et al.  A 2-D microcantilever array for multiplexed biomolecular analysis , 2004, Journal of Microelectromechanical Systems.

[9]  W. Fang,et al.  Determining mean and gradient residual stresses in thin films using micromachined cantilevers , 1996 .

[10]  James K. Gimzewski,et al.  An artificial nose based on a micromechanical cantilever array , 1999 .

[11]  L. Lechuga,et al.  Dimension dependence of the thermomechanical noise of microcantilevers , 2006 .

[12]  M. Esashi,et al.  Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus , 2003 .

[13]  B. Rogers,et al.  Nanowatt chemical vapor detection with a self-sensing, piezoelectric microcantilever array , 2003 .

[14]  H. Lang,et al.  Multiple label-free biodetection and quantitative DNA-binding assays on a nanomechanical cantilever array , 2002, Proceedings of the National Academy of Sciences of the United States of America.

[15]  James K. Gimzewski,et al.  Observation of a chemical reaction using a micromechanical sensor , 1994 .