Design and the Position Analysis of a Novel Translational Orthogonal Parallel Micromanipulator

A novel translational orthogonal parallel micromanipulator of unique design is proposed, it is the variation of DELTA robot. The structure and layout features of the parallel micromanipulator are described. Based on its architecture feature, direct and inverse kinematics equations are developed. The micro-displacement of moving platform is simulated by loading the displacement of a one-way branch, after establishing the finite element analysis model of the micromanipulator. Comparing the simulation result with the theoretical value, the results show that it has many advantages such as better isotropic properties, perfect movement decoupling and high precision. Therefore, the micromanipulator can be widely applied to the fields of precision machinery, genetic engineering and microelectronic packaging, etc.