Modeling, simulation and validation of the dynamic performance of a single-pole single-throw RF-MEMS contact switch

This work presents a low-complexity dynamic model of a single-pole single-throw (SPST) ruthenium contact radio frequency (RF) MEMS switch. The model is based on a fabricated switch geometry and relies on dynamic Euler-Bernoulli beam theory incorporating the squeeze-film damping effect and contact mechanics interaction. Hertz theory and the JKR adhesion model are used in contact mechanics with a Gaussian probability surface asperity height distribution to model the interaction between the contact tip and drain. The simulated results for switch closing time, number and duration of bounces, contact deformation, settling time and dual-pulse control strategy are in good agreement with measured experimental results. The experimental validation proves that the proposed modeling framework can accurately simulate the dynamic behavior of the MEMS switch and serve as a design tool for dynamic optimization and development of control strategies that maximize the reliability of the MEMS switches.

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