3D coupled electro-mechanics for MEMS: applications of CoSolve-EM
暂无分享,去创建一个
[1] William C. Tang,et al. Electrostatic Comb Drive Levitation And Control Method , 1992 .
[2] Jacob K. White,et al. FastCap: a multipole accelerated 3-D capacitance extraction program , 1991, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..
[3] S. Senturia,et al. Self-consistent simulation and modelling of electrostatically deformed diaphragms , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.
[4] B. E. Artz,et al. A finite element method for determining structural displacements resulting from electrostatic forces , 1992, Technical Digest IEEE Solid-State Sensor and Actuator Workshop.
[5] K. Najafi,et al. A novel technique and structure for the measurement of intrinsic stress and Young's modulus of thin films , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.
[6] John K. Ousterhout,et al. Tcl and the Tk Toolkit , 1994 .
[7] Jan G. Korvink,et al. A micro electro mechanical CAD extension for SESES , 1993 .