Quasi-static kinematics model for motion errors of closed hydrostatic guideways in ultra-precision machining

Abstract Aspheric optics has been widely employed in some high-tech industries for its superiority. In order to achieve the ultra-precision machining of these aspheric surfaces, the large optical ultra-precision grinding machine becomes crucial because it determines the efficiency of the whole process. As the key functional unit in ultra-precision machine tool, the hydrostatic guideways are commonly adopted for the excellent performance. However, the motion errors of hydrostatic guideways have a direct influence on the accuracy of the machined workpiece, and some analysis approaches have been reported correspondingly. Although the existed analysis models do work, their imperfections also can be easily captured. Accordingly, a novel analysis model with less imperfection is deserved to be developed. In this paper, the kinematic theory is utilized to establish the quasi-static analysis model for motion errors in closed hydrostatic guideways. Through the large ultra-precision grinding machine designed by our research group, the consistently good agreement between the predicted results and the measured experimental data are obtained. Furthermore, it is found that the motion accuracy is more sensitive to the profile error of the guide rail bearing the external load rather than that of the other guide rail in the closed hydrostatic guideway. The presented research is supposed to be valuable to the peer designers.