Modeling and Experiment of an Active Pneumatic Vibration Isolator according to ISO 6358

In some precision manufacturing processes, like the transportation of TFT-LCD or solar-energy panels, the vibration control of the transportation platform is the key technology to prevent the panels from being damaged. Nowadays, passive vibration isolator is still widely used in the design of the transportation platform because of its simple structure and easy maintenance. The disadvantage, however, is its limited performance become it has no means of adding extra energy to the system. Therefore, the advanced active vibration isolator becomes the effective solution to suppress the vibration of the transportation platform. In this paper, a brand new modeling methodology for an active pneumatic vibration isolator is developed. This mathematical model is based on the international standard ISO 6358. Finally, after comparing the results by experiment and simulation, it is proved that the mathematical model based on ISO 6358 can accurately simulate the dynamic response of the active pneumatic vibration isolator.