On the Ammonia Gas Sensing Performance of a RF Sputtered NiO Thin-Film Sensor

An interesting ammonia gas sensor based on a p-type NiO thin film, prepared by a radio frequency sputtering process, is studied and demonstrated. As compared with conventional n-type metal-oxide sensors, the studied device shows comparable and good sensing performance, including a high-sensing response ratio of 289%, a lower response time of 31 s, and a lower recovery time of 78 s, under an introduced 1000 ppm NH3/air gas at 250 °C and 350 °C, respectively. In addition, the studied sensor device exhibits a lower detection limit (<;5 ppm NH3/air) at 250 °C. Consequently, based on these advantages and inherent benefits of low cost, chemical stability, and easy fabrication, etc., the studied NiO thin-film sensor shows the promise for high-performance ammonia gas sensing applications.

[1]  Wen-Chau Liu,et al.  Ammonia Gas Sensing Performance of an Indium Tin Oxide (ITO) Based Device with an Underlying Au-Nanodot Layer , 2013 .

[2]  Ivan P. Parkin,et al.  A microstructural model of semiconducting gas sensor response: The effects of sintering temperature on the response of chromium titanate (CTO) to carbon monoxide , 2006 .

[3]  Michael Dudley,et al.  Fabrication and characterization of polycrystalline WO3 nanofibers and their application for ammonia sensing. , 2006, The journal of physical chemistry. B.

[4]  Po-Cheng Chou,et al.  Study of an electroless plating (EP)-based Pt/AlGaN/GaN Schottky diode-type ammonia sensor , 2014 .

[5]  K. Arshak,et al.  Influence of the Poly(Vinyl Butyral) Binder in Screen-Printed Thick-Film Gas Sensors Containing ${\rm NiO}{\hbox{-}}{\rm TiO}_{2}$ Oxides , 2007, IEEE Sensors Journal.

[6]  Baikun Li,et al.  Ammonia Gas Sensor Using Polypyrrole‐Coated TiO2/ZnO Nanofibers , 2009 .

[7]  N. Hoa,et al.  In-situ decoration of Pd nanocrystals on crystalline mesoporous NiO nanosheets for effective hydrogen gas sensors , 2013 .

[8]  Lijun Li,et al.  Investigation of electrical and ammonia sensing characteristics of Schottky barrier diode based on a single ultra-long ZnO nanorod , 2008 .

[9]  T. Hyodo,et al.  Microsphere templating as means of enhancing surface activity and gas sensitivity of CaCu(3)Ti(4)O(12) thin films. , 2006, Nano letters.

[10]  Hsiao-Wen Zan,et al.  Pentacene-Based Organic Thin Film Transistors for Ammonia Sensing , 2012, IEEE Sensors Journal.

[11]  Onkar Singh,et al.  ZnO assisted polyaniline nanofibers and its application as ammonia gas sensor , 2014 .

[12]  Soo-Keun Lee,et al.  Gas sensors based on carbon nanoflake/tin oxide composites for ammonia detection. , 2014, Journal of hazardous materials.

[13]  Chung-Fu Chang,et al.  On an Ammonia Gas Sensor Based on a Pt/AlGaN Heterostructure Field-Effect Transistor , 2012, IEEE Electron Device Letters.

[14]  Geoffrey A. Ozin,et al.  Tin dioxide opals and inverted opals: near-ideal microstructures for gas sensors , 2001 .

[15]  Florian Solzbacher,et al.  H2 gas sensor performance of NiO at high temperatures in gas mixtures , 2010 .

[16]  Wen-Chau Liu,et al.  ZnO-Nanorod-Based Ammonia Gas Sensors With Underlying Pt/Cr Interdigitated Electrodes , 2012, IEEE Electron Device Letters.

[17]  B. Jeyaprakash,et al.  High sensing response of β-Ga2O3 thin film towards ammonia vapours: Influencing factors at room temperature , 2014 .

[18]  G. Lo,et al.  A two-step hydrothermally grown ZnO microtube array for CO gas sensing , 2007 .

[19]  S. L. Patil,et al.  Room Temperature Ammonia Gas Sensor Based on Polyaniline-TiO$_{2}$ Nanocomposite , 2011, IEEE Sensors Journal.

[20]  S. Choopun,et al.  Characterization of ZnO Nanobelt-Based Gas Sensor for ${\rm H}_{2}$, ${\rm NO}_{2}$, and Hydrocarbon Sensing , 2007, IEEE Sensors Journal.

[21]  S. Capone,et al.  Enhancement of H2 sensing properties of NiO-based thin films with a Pt surface modification , 2004 .

[22]  N. Bârsan,et al.  In2O3 and MoO3–In2O3 thin film semiconductor sensors: interaction with NO2 and O3 , 1998 .

[23]  Hailong Lu,et al.  Size Dependence of Gas Sensitivity of ZnO Nanorods , 2007 .

[24]  D. Mohammadyani,et al.  Synthesis of wide band gap nanocrystalline NiO powder via a sonochemical method. , 2012, Ultrasonics sonochemistry.

[25]  Wen-Chau Liu,et al.  Ammonia sensing characteristics of a Pt/AlGaN/GaN Schottky diode , 2011 .