Electro-thermal analysis of RF MEM capacitive switches for high-power applications

Self heating in electrostatically actuated RF MEM capacitive shunt switches is analyzed by coupled electrical and thermal simulations using three-dimensional finite-element analysis. The result shows that despite highly nonuniform current and temperature distributions, the self-heating effect can be approximated by lumped thermal resistances of the switch membrane and the substrate. Additionally, since the thermal resistance of thermally insulating substrates such as quartz is significant compared to that of the membrane, it is important to consider the heat transfer across both the membrane and the substrate.

[1]  Gabriel M. Rebeiz,et al.  A Stress-Tolerant Temperature-Stable RF MEMS Switched Capacitor , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[2]  C. Goldsmith,et al.  Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes , 2009, IEEE Transactions on Microwave Theory and Techniques.

[3]  Paola Farinelli,et al.  A low contact-resistance winged-bridge RF-MEMS series switch for wide-band applications , 2007 .

[4]  J. Iannacci,et al.  Evolution of electrical parameters of dielectric-less ohmic RF-MEMS switches during continuous actuation stress , 2009, 2009 Proceedings of the European Solid State Device Research Conference.

[5]  Gabriel M. Rebeiz,et al.  Steady state thermal analysis and high-power reliability considerations of RF MEMS capacitive switches , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).

[6]  James C. M. Hwang,et al.  Robust RF MEMS switches and phase shifters for aerospace applications , 2009, 2009 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT).

[7]  L.P.B. Katehi,et al.  A study of thermal effects in RF-MEM-switches using a time domain approach , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).

[8]  A. Crunteanu,et al.  Dielectric less capacitive MEMS switches , 2004, 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535).

[9]  J.R. Reid,et al.  RF actuation of capacitive MEMS switches , 2003, IEEE MTT-S International Microwave Symposium Digest, 2003.

[10]  R. Plana,et al.  Thermal analysis of RF-MEMS switches for power handling front-end , 2005, 2005 European Microwave Conference.