Foundations of Vacuum Science and Technology

Kinetic Theory of Gases. Flow of Gases Through Tubes and Orifices. Positive Displacement Vacuum Pumps. Kinetic Vacuum Pumps. Capture Vacuum Pumps. Vacuum Gauges. Partial Pressure Analysis. Leak Detection and Leak Detectors. High-Vacuum System Design. Gas-Surface Interactions and Diffusion. Ultrahigh and Extreme High Vacuum. Calibration and Standards Appendix. Indexes.