Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images

We present a straightforward method for measuring in-plane linear displacements of microelectromechanical systems (MEMS) with subnanometer resolution. The technique is based on Fourier transform analysis of a video recorded with a Charge-Coupled Device (CCD) camera attached to an optical microscope and can be used to characterize any device featuring periodic patterns along the direction of motion. Using a digital microscope mounted on a vibration isolation table, a subpixel resolution better than 1/100 pixel could be achieved, enabling quasi-static measurements with a resolution of 0.5 nm.

[1]  Sylvain Petitgrand,et al.  Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends , 2003 .

[2]  Christian Rembe,et al.  MEMS characterization using new hybrid laser Doppler vibrometer/strobe video system , 2003, SPIE MOEMS-MEMS.

[3]  M. Pirmohamed,et al.  Comparison of the metabolism and toxicity of dapsone in rat, mouse and man. , 1997, The Journal of pharmacology and experimental therapeutics.

[4]  Christian Rembe,et al.  Optical measurement methods to study dynamic behavior in MEMS , 2001, Lasers in Metrology and Art Conservation.

[5]  Rongming Lin,et al.  Structural dynamics of microsystems—current state of research and future directions , 2006 .

[6]  H. Fujita,et al.  Modal analysis and modeling of a frictionless electrostatic rotary stepper micromotor , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

[7]  O Manzardo,et al.  Miniaturized time-scanning Fourier Transform Spectrometer based on silicon technology , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[8]  Hiroyuki Fujita,et al.  An electrostatic 3-phase linear stepper motor fabricated by vertical trench isolation technology , 2009 .

[9]  H. Fujita,et al.  Silicon Nanotweezers With Subnanometer Resolution for the Micromanipulation of Biomolecules , 2008, Journal of Microelectromechanical Systems.

[10]  E Sarajlic,et al.  Subnanometer Translation of Microelectromechanical Systems Measured by Discrete Fourier Analysis of CCD Images , 2010, Journal of Microelectromechanical Systems.