Optical and electronic properties of transparent conducting ZnO and ZnO:Al films prepared by evaporating method

Abstract Undoped and Aluminium-doped Zinc oxide films have been prepared by thermal evaporation of zinc acetate (Zn(CH3COO)2·2H2O] and aluminium chloride (AlCl3) onto a heated glass substrate. The structural, optical and electrical properties of the films have been studied. The effects of heat treatment for the as-deposited films in air and vacuum are investigated. Over 80% transmittance films with conductivity as low as 2×10 −3 Ω cm can be produced by controlling the deposition parameters. The electron carrier densities are in the range 0.2–7×10 19 cm−3 with mobilities of 22–58 cm2/Vs.

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