Test structures to characterise a novel circuit fabrication technique that uses offset lithography
暂无分享,去创建一个
[1] M. W. Cresswell,et al. Extraction of sheet resistance from four-terminal sheet resistors replicated in monocrystalline films with non-planar geometries , 1998, ICMTS 1998. Proceedings of 1998 International Conference on Microelectronic Test Structures (Cat. No.98CH36157).
[2] Anthony J. Walton,et al. Numerical analysis of the effect of geometry on the performance of the Greek cross structure , 1996, Proceedings of International Conference on Microelectronic Test Structures.
[3] W. R. Thurber,et al. An Experimental Study of Various Cross Sheet Resistor Test Structures , 1978 .
[4] W. R. Thurber,et al. Bridge and van der Pauw Sheet Resistors for Characterizing the Line Width of Conducting Layers , 1978 .