Fabrication of two-dimensional photonic crystal waveguides for 1.5 μm in silicon by deep anisotropic dry etching
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Tony Zijlstra | E. Snoeks | E. V. D. Drift | M. D. Dood | A. Polman | T. Zijlstra | E. van der Drift | E. Snoeks | A. Polman | M. J. A. de Dood
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