Dynamic analysis of capacitive micromechanical silicon gyroscope with three frames

In order to solve the inevitable error in the machining of silicon micromechanical gyroscope with double frames,the system of capacitive micromechanical gyroscope with three frames is put forward.With static electronic differential driving,comb-finger capacitance,more flexible poles,the gyroscope solves the coupling from theory analysis and processing error.The sensitivity of gyroscope is improved by improving the mass of middle frame.The principle of the gyroscope is presented.Detailed dynamic equation and MATLAB simulation a analysis are also presented.