论文信息 - Plasma enhanced atomic layer deposition of Ga2O3 thin films - 字舞流文

Plasma enhanced atomic layer deposition of Ga2O3 thin films

C. Detavernier | J. Dendooven | H. Poelman | J. Martens | D. Poelman | J. Botterman | Ranjith K. Ramachandran | S. P. Sree