Two-Dimensional Multi-Channel Neural Probes With Electronic Depth Control

This paper presents multi-electrode arrays for in vivo neural recording applications incorporating the principle of electronic depth control (EDC), i.e., the electronic selection of recording sites along slender probe shafts independently for multiple channels. Two-dimensional (2D) arrays were realized using a commercial 0.5- μm complementary-metal-oxide-semiconductor (CMOS) process for the EDC circuits combined with post-CMOS micromachining to pattern the comb-like probes and the corresponding electrode metallization. A dedicated CMOS integrated front-end circuit was developed for pre-amplification and multiplexing of the neural signals recorded using these probes.

[1]  U. Hofmann,et al.  Institute of Physics Publishing Journal of Micromechanics and Microengineering a 32-site Neural Recording Probe Fabricated by Drie of Soi Substrates , 2022 .

[2]  O. Paul,et al.  Ultrathin Silicon Chips of Arbitrary Shape by Etching Before Grinding , 2011, Journal of Microelectromechanical Systems.

[3]  C. Van Hoof,et al.  A 3D slim-base probe array for in vivo recorded neuron activity , 2008, 2008 30th Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[4]  Patrick Ruther,et al.  Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording , 2009 .

[5]  K. Wise,et al.  An implantable CMOS circuit interface for multiplexed microelectrode recording arrays , 1992 .

[6]  O. Paul,et al.  Microprobe Array with Low Impedance Electrodes and Highly Flexible Polyimide Cables for Acute Neural Recording , 2007, 2007 29th Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[7]  F. Solzbacher,et al.  In vitro comparison of sputtered iridium oxide and platinum-coated neural implantable microelectrode arrays , 2010, Biomedical materials.

[8]  Patrick Ruther,et al.  A Novel Assembly Method for Silicon-Based Neural Devices , 2009 .

[9]  R. R. Harrison,et al.  A low-power low-noise CMOS amplifier for neural recording applications , 2003, IEEE J. Solid State Circuits.

[10]  Rajmohan Bhandari,et al.  A novel masking method for high aspect ratio penetrating microelectrode arrays , 2009 .

[11]  E. M. Schmidt,et al.  Electrodes for Many Single Neuron Recordings , 1998 .

[12]  G. Paxinos,et al.  The Rat Brain in Stereotaxic Coordinates , 1983 .

[13]  Michael S. Baker,et al.  An array of microactuated microelectrodes for monitoring single-neuronal activity in rodents , 2005, IEEE Transactions on Biomedical Engineering.

[14]  T. Stieglitz,et al.  CMOS-Based High-Density Silicon Microprobe Array for Electronic Depth Control in Neural Recording , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[15]  Patrick Merken,et al.  The NeuroProbes project: A concept for electronic depth control , 2008, 2008 30th Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[16]  Zoran Nenadic,et al.  Semi-chronic motorized microdrive and control algorithm for autonomously isolating and maintaining optimal extracellular action potentials. , 2005, Journal of neurophysiology.

[17]  Michale S Fee,et al.  Miniature motorized microdrive and commutator system for chronic neural recording in small animals , 2001, Journal of Neuroscience Methods.

[18]  Amir M. Sodagar,et al.  Microelectrodes, Microelectronics, and Implantable Neural Microsystems , 2008, Proceedings of the IEEE.

[19]  T. Stieglitz,et al.  Development of Modular Multifunctional Probe Arrays for Cerebral Applications , 2007, 2007 3rd International IEEE/EMBS Conference on Neural Engineering.

[20]  K. Horch,et al.  A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array , 1991, IEEE Transactions on Biomedical Engineering.

[21]  J. Kubie.  A driveable bundle of microwires for collecting single-unit data from freely-moving rats , 1984, Physiology & Behavior.

[22]  Qing Bai,et al.  A high-yield microassembly structure for three-dimensional microelectrode arrays , 2000, IEEE Transactions on Biomedical Engineering.

[23]  Daryl R. Kipke,et al.  Wireless implantable microsystems: high-density electronic interfaces to the nervous system , 2004, Proceedings of the IEEE.

[24]  Patrick Ruther,et al.  Control and data acquisition software for high-density CMOS-based microprobe arrays implementing electronic depth control , 2010, Biomedizinische Technik. Biomedical engineering.

[25]  Patrick Ruther,et al.  Recent Progress in Neural Probes Using Silicon MEMS Technology , 2010 .