A guide to short-channel effects in MOSFETs

Short-channel effects form a very important consideration for the performance of very-large-scale integrated circuits built with ultrasmall devices. Definitions of each of the observed short-channel effects in MOSFETs are given by describing their respective phenomenological meanings. The impact of these parameters on the measured I-V curves, as well as the differentiation between long-channel and short-channel behavior from the measured data, are discussed.