Invited Paper Plasma-Spectra In Materials Processing By Excimer Lasers

Materials processing utilizing excimer lasers is enjoying rapidly increasing interest due to the growing number of promising fields of application. Especially processes like ablation and micro-processing gain more and more attention. However, little is konwn about the mechanisms involved in the interaction of UV-radiation with matter and experimental data on process parameters such as ablation rate, wavelength, puls rate of operation etc. are not sufficient for controlled applications with high quality and reproducibility. Therefore plain and clear criteria have to be found in order to garantee the desired standard.