Precision nano-alignment system using machine vision with motion controlled by piezoelectric motor
暂无分享,去创建一个
Y. S. Tarng | C. Y. Nian | W. M. Kuo | S. F. Chuang | Y. Tarng | W. Kuo | S. Chuang | C. Nian
[1] Rong-Fong Fung,et al. Precision position control using combined piezo-VCM actuators , 2005 .
[2] Y. S. Tarng,et al. A new algorithm for a three-axis auto-alignment system using vision inspection , 2006 .
[3] David A. Henderson,et al. Nanometer precision robot for active photonics alignment using INCHWORM motors , 2001, SPIE OPTO.
[4] Wu Lin,et al. Concepts for a class of novel piezoelectric self-locking long-stroke actuators , 2002 .
[5] Chern-Sheng Lin,et al. An image system for fast positioning and accuracy inspection of ball grid array boards , 2001, Microelectron. Reliab..
[6] Hyong Tae Kim,et al. 2-Step algorithm for automatic alignment in wafer dicing process , 2004, Microelectron. Reliab..
[7] C.S. Song,et al. Matrix form of automatic alignment algorithm in 2D space , 2004, Proceedings of the IEEE International Conference on Mechatronics, 2004. ICM '04..
[8] Shang-Hong Lai,et al. A Hybrid Image Alignment System for Fast and Precise Pattern Localization , 2002, Real Time Imaging.
[9] Douglas C. Montgomery,et al. Applied Statistics and Probability for Engineers, Third edition , 1994 .
[10] Y. S. Tarng,et al. An auto-alignment vision system with three-axis motion control mechanism , 2005 .