Design Optimization of a Fully-Compliant Bistable Micro-Mechanism

Bistable behavior is desirable for a variety of applications because power is applied only during switching, and the mechanism state remains the same regardless of any power interruptions. The low variability in the stable positions also makes accurate open-loop control of many systems possible, and the precise switching characteristics make them valuable in sensing arrays. In this paper, fully-compliant bistable micromechanisms were modeled using finite elements. This model was then coupled with an optimization program, allowing extensive exploration of the design space. Three designs within this space were generated by minimizing the layout size of the devices subject to force constraints. These designs were subsequently manufactured and tested to verify bistability, with each mechanism snapping as expected between the two stable positions. The design space was then further explored to determine the behavior of the device as the maximum force output increased. This study revealed that the minimum layout size increases with the maximum force output.

[1]  B. Halg On a micro-electro-mechanical nonvolatile memory cell , 1990 .

[2]  Massimo Piotto,et al.  A micromachined bistable 1×2 switch for optical fibers , 2000 .

[3]  Hiroyuki Fujita,et al.  Self-aligned vertical mirror and V-grooves applied to an optical-switch: modeling and optimization of bi-stable operation by electromagnetic actuation , 2001 .

[4]  J. Qiu,et al.  A centrally-clamped parallel-beam bistable MEMS mechanism , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[5]  Y. Bäcklund,et al.  A lateral symmetrically bistable buckled beam , 1998 .

[6]  Alan R. Parkinson,et al.  Development of a Hybrid SQP-GRG Algorithm for Constrained Nonlinear Programming , 1988 .

[7]  T. Abe,et al.  A proportional microvalve using a bi-stable magnetic actuator , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

[8]  C. D. Gelatt,et al.  Optimization by Simulated Annealing , 1983, Science.

[9]  Oliver Paul,et al.  Mechanical properties of thin films from the load deflection of long clamped plates , 1998 .

[10]  W. Fang,et al.  Comments on measuring thin-film stresses using bi-layer micromachined beams , 1995 .

[11]  M. Hoffmann,et al.  Optical fibre switches based on full wafer silicon micromachining , 1999 .

[12]  Larry L. Howell,et al.  Design of two-link, in-plane, bistable compliant micro-mechanisms , 1999 .

[13]  Hans Joachim Quenzer,et al.  Bistable microvalve with pneumatically coupled membranes , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[14]  Larry L. Howell,et al.  A Method for the Design of Compliant Mechanisms With Small-Length Flexural Pivots , 1994 .

[15]  Werner Karl Schomburg,et al.  Design optimization of bistable microdiaphragm valves , 1998 .

[16]  W. Menz,et al.  Microvalves with bistable buckled polymer diaphragms , 1996 .

[17]  M. Saif On a tunable bistable MEMS-theory and experiment , 2000, Journal of Microelectromechanical Systems.

[18]  K. R. Farmer,et al.  A bistable microrelay based on two-segment multimorph cantilever actuators , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.