Magnetostrictively deforming the surface of a silicon wafer at two locations
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M. P. Ulmer | R. Coppejans | M. A. Khreishi | K. Keely | D. B. Buchholz | R. Shiri | L. A. Rodriguez | A. E. O'Donnell | Z. J. Schonfeld | W. H. Reinhardt | L. E. Borgsmiller | T. B. Baturalp | V. L. Coverstone | J. Cao
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