The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter

This paper presents a new electrostatic RF MEMS resonator design: the radial bulk annular resonator (RBAR). The RBAR utilizes the bulk radial resonant modes of an annulus. The theory behind the RBAR, and its predecessor the bulk longitudinal resonator (BLR), will be developed and discussed. It is found that the RBAR is capable of achieving an arbitrarily low motional resistance for any desired resonant frequency at the cost of increased average annular radius. This feature makes the RBAR attractive for minimizing insertion loss in bandpass filters.

[1]  Tomi Mattila,et al.  A 12 MHz micromechanical bulk acoustic mode oscillator , 2002 .

[2]  M. Blencowe.  Nanoelectromechanical systems , 2005, cond-mat/0502566.

[3]  M. U. Demirci,et al.  Stemless wine-glass-mode disk micromechanical resonators , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.

[4]  J. Larson,et al.  Ultra-miniature high-Q filters and duplexers using FBAR technology , 2001, 2001 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC (Cat. No.01CH37177).

[5]  J.R. Clark,et al.  High-Q VHF micromechanical contour-mode disk resonators , 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).