论文信息 - Ultra-thin gate oxides and ultra-shallow junctions for high performance, sub-100 nm pMOSFETs - 字舞流文

Ultra-thin gate oxides and ultra-shallow junctions for high performance, sub-100 nm pMOSFETs

P. Silverman | T. Sorsch | G. Timp | F. Klemens | J. Bower | L. Ocola | H. Gossmann | D. Jacobson | T. Boone | M. Green | S. Moccio | W. Timp | J. Sapjeta | M. O’Malley | J. Gamo | D. Tennani