Design considerations for 6.5 kV IGBT devices

Abstract This article addresses the design of an optimal cell suitable for 6.5 kV Insulated Gate Bipolar Transistor (IGBTs). Simulations of the layout optimisation and process technology considerations for the 6.5 kV IGBT basic cell are presented. The simulation led directly to a monitor chip with several variant IGBT test structures, which has been fabricated and characterised. As a result, a large area 6.5 kV IGBT and FRD has been designed, fabricated and characterised as a 200 A power module with V cesat =4 V at 25 °C and switching from 4.4 kV at 125 °C, exhibiting excellent electrical performance.

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