Droplet target for low-debris laser-plasma soft X-ray generation

A water window (lambda = 2.3-4.4 nm) laser-plasma X-ray source which uses ethanol droplets as target is described. This target significantly reduces debris production compared to conventional targets. The < 25 mum X-ray source primarily produces narrow bandwidth carbon and oxygen ion line emission. Absolute emission at lambda = 3.4 nm is 0.5 x 10(12) photons/(ster line pulse).

[1]  Hans Stattin Thin Film Soft X-ray Absorption Filters. , 1992 .

[2]  P. K. Carroll,et al.  Repetitively pulsed-plasma soft x-ray source. , 1984, Applied optics.

[3]  J. Fulghum Determination of overlayer thickness by angle-resolved XPS: A comparison of algorithms , 1993 .

[4]  K. Stephan,et al.  Comparison of different x‐ray sources using the same printing process parameters , 1987 .

[5]  M. Kühne,et al.  Soft x-ray radiation from laser-produced plasmas: characterization of radiation emission and its use in x-ray lithography. , 1988, Applied optics.

[6]  R. H. Stulen,et al.  Diffraction-limited soft-x-ray projection imaging using a laser plasma source. , 1991, Optics letters.

[7]  Yabe,et al.  Atomic-number dependence of soft-x-ray emission from various targets irradiated by a 0.53- microm-wavelength laser. , 1986, Physical review. A, General physics.

[8]  A. Michette X-ray microscopy , 1988 .

[9]  R. Byer,et al.  Tomographic imaging of micrometer-sized optical and soft-x-ray beams. , 1990, Optics letters.

[10]  Takayasu Mochizuki,et al.  Soft x‐ray emission from ω0, 2ω0, and 4ω0 laser‐produced plasmas , 1986 .

[11]  L. Marton,et al.  Advances in Electronics and Electron Physics , 1958 .

[12]  Hawkes Advances in electronics and electron physics , 1990 .

[13]  R. Feder,et al.  Nondestructive single-shot soft x-ray lithography and contact microscopy using a laser-produced plasma source. , 1987, Applied optics.

[14]  Franz Schäfers,et al.  Schottky type photodiodes as detectors in the VUV and soft x-ray range. , 1988, Applied optics.

[15]  R. Elton,et al.  Solid-neon sources for plasmas and x-ray lasers. Interim report , 1985 .

[16]  A. Heuberger,et al.  X‐ray lithography , 1988 .

[17]  R. O'Connell,et al.  Abel inversion of knife-edge data from radially symmetric pulsed laser beams. , 1987, Applied optics.