论文信息 - Replication of refractive micro-optomechanical components made with deep lithography with protons

Replication of refractive micro-optomechanical components made with deep lithography with protons

Deep Lithography with Protons (DLP) is a rapid prototyping technology for the fabrication of 3D micro-optical precision components. In this paper we will demonstrate how we made this DLP technology compatible with commercially available injection-molding and vacuum casting techniques, allowing to mass-replicate high-quality micro-optical modules at low cost. We will illustrate our technology by presenting optical characteristics of different refractive components made in optical-grade plastics such as polymethyl-methacrylate (PMMA), polycarbonate (PC) and semiconductor compatible plastics with high glass-transition temperatures such as COC.

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