Micromechanical three-axial tactile force sensor for micromaterial characterisation

Abstract A three-axial tactile force sensor for the investigation of micromechanical structures has been developed using silicon micromachining technology. The sensor is capable of performing mechanical micro material characterisation such as the determination of the spring constant of complex micromechanical structures. Another application for this sensor is dimensional metrology where it has been tested as a 3D probe in a test set-up for coordinate measurements.