论文信息 - Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors

Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors

We developed achromatic full-field hard X-ray microscopy on the basis of advanced Kirkpatrick-Baez mirrors consisting of four total-reflection mirrors. The microscope system consists of advanced Kirkpatrick-Baez mirrors as an objective, Kirkpatrick-Baez mirrors as a condenser and an X-ray CCD camera. The performance of the system was investigated using a Siemens star chart with a minimum resolution of 50 nm at BL29XUL of SPring-8 at 10 keV. As a result, a spatial resolution of ~150 nm was achieved. Also, no chromatic aberration was confirmed by taking images at an X-ray energy from 8 to 11.5 keV.

[1] Kazuto Yamauchi,et al. Simulation study of four-mirror alignment of advanced Kirkpatrick−Baez optics , 2010 .

[2] Y. Kato,et al. Development of an advanced Kirkpatrick-Baez microscope. , 1996, Optics letters.

[3] Y. Mori,et al. Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining , 2002 .

[4] Hidekazu Mimura,et al. One-dimensional Wolter optics with a sub-50 nm spatial resolution. , 2010, Optics letters.

[5] Hidekazu Mimura,et al. Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolution. , 2012, Optics express.