Optimization issues regarding microcantilever design and fabrication

The paper is dedicated to a cantilever sensor design/fabrication optimization which is related to a no curved structure, before bimolecular functionallization and immobilization. The advantage of cantilever arrays is not only their small size but also their suitability for mass production, which permits economically realistic, disposable sensors. The simulations of the cantilever in the static mode have been performed in order to evaluate the sensitivity of the device at very low mass loading (ng). The simulations/ fabrication had the role to optimize the dimensions of the cantilevers in order to obtain a stress free structure, able to be functionalized and to bent when biomolecules bond. Also, SEM, Interferometer measurements were made in order to characterize the microstructures.

[1]  C. Goldsmith,et al.  A new in situ residual stress measurement method for a MEMS thin fixed-fixed beam structure , 2002 .

[2]  Thomas Thundat,et al.  Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers , 1995 .

[3]  Carl V. Thompson,et al.  Stress and grain growth in thin films , 1996 .

[4]  James K. Gimzewski,et al.  Surface stress in the self-assembly of alkanethiols on gold , 1997 .

[5]  M. Grattarola,et al.  Micromechanical cantilever-based biosensors , 2001 .

[6]  Claude A. Klein,et al.  How accurate are Stoney’s equation and recent modifications , 2000 .

[7]  Hans-Jürgen Butt,et al.  A Sensitive Method to Measure Changes in the Surface Stress of Solids , 1996 .

[8]  J. Schweitz.  A new and simple micromechanical approach to the stress-strain characterization of thin coatings , 1991 .

[9]  P. M. Marcus.  Curvature of multilayer epitaxial films , 1996 .

[10]  William D. Nix,et al.  Mechanical properties of thin films , 1989 .

[11]  L. Nicu,et al.  Energy study of buckled micromachined beams for thin-film stress measurements applied to SiO2 , 1999 .

[12]  Drechsler,et al.  A cantilever array-based artificial nose , 2000, Ultramicroscopy.

[13]  W. Fang,et al.  Determining mean and gradient residual stresses in thin films using micromachined cantilevers , 1996 .

[14]  C. Pachiu,et al.  Simulation and Design of a Microcantilever for Biosensing Application , 2007, 2007 International Semiconductor Conference.