Micromachined Flow Sensors in Biomedical Applications

Application fields of micromachined devices are growing very rapidly due to the continuous improvement of three dimensional technologies of micro-fabrication. In particular, applications of micromachined sensors to monitor gas and liquid flows hold immense potential because of their valuable characteristics (e.g., low energy consumption, relatively good accuracy, the ability to measure very small flow, and small size). Moreover, the feedback provided by integrating microflow sensors to micro mass flow controllers is essential to deliver accurately set target small flows. This paper is a review of some application areas in the biomedical field of micromachined flow sensors, such as blood flow, respiratory monitoring, and drug delivery among others. Particular attention is dedicated to the description of the measurement principles utilized in early and current research. Finally, some observations about characteristics and issues of these devices are also reported.

[1]  Gerald Urban,et al.  Wide range semiconductor flow sensors , 2000 .

[2]  G. Stemme,et al.  A new bi-directional gas-flow sensor based on lift force , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[3]  M. Laghrouche,et al.  In situ Calibration of Wall Shear Stress Sensor For micro Fluidic Application , 2011 .

[4]  Gerald Urban,et al.  Microminiaturized thermistor arrays for temperature gradient, flow and perfusion measurements , 1991 .

[5]  M. Allen,et al.  Micromachined endovascularly-implantable wireless aneurysm pressure sensors: from concept to clinic , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[6]  Sergio Silvestri,et al.  A transistor based air flow transducer for thermohygrometric control of neonatal ventilatory applications. , 2008, The Review of scientific instruments.

[7]  Zhen Fang,et al.  Drag force micro solid state silicon plate wind velocity sensor , 2009 .

[8]  Wen J. Li,et al.  Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement , 2010 .

[9]  D L Polla,et al.  Microdevices in medicine. , 2000, Annual review of biomedical engineering.

[10]  Pasqualina M. Sarro,et al.  Pressure and flow sensor for use in catheters , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[11]  A.F.P. van Putten,et al.  An integrated silicon anemometer , 1974 .

[12]  Göran Stemme,et al.  A lift force sensor with integrated hot-chips for wide range flow measurements , 2003 .

[13]  Chien-Hsiung Tsai,et al.  Design and characterization of MEMS-based flow-rate and flow-direction microsensor , 2009 .

[14]  Sergio Silvestri,et al.  Mathematical model and minimal measurement system for optimal control of heated humidifiers in neonatal ventilation. , 2010, Medical engineering & physics.

[15]  Young Ho Seo,et al.  A self-resonant micro flow velocity sensor based on a resonant frequency shift by flow-induced vibration , 2010 .

[16]  Sheng Liu,et al.  A micro channel integrated gas flow sensor for high sensitivity , 2008, 2008 11th Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems.

[17]  Gerald Urban,et al.  A 2D thermal flow sensor with sub-mW power consumption , 2010 .

[18]  Xiaojing Zhang,et al.  Silicon microsurgery‐force sensor based on diffractive optical MEMS encoders , 2004 .

[19]  B. W. Oudheusden.  Silicon thermal flow sensors , 1992 .

[20]  Miko Elwenspoek,et al.  Resonating microbridge mass flow sensor , 1990 .

[21]  Alan G. R. Evans,et al.  Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing , 2002 .

[22]  Dung-An Wang,et al.  A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme , 2009, Sensors.

[23]  Sergio Silvestri,et al.  An optical fiber based flow transducer for infant ventilation: Measurement principle and calibration , 2011, 2011 IEEE International Symposium on Medical Measurements and Applications.

[24]  C. Chiang,et al.  A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure , 2007, Sensors.

[25]  Z. Djuric,et al.  Multipurpose MEMS thermal sensor based on thermopiles , 2008 .

[26]  Stephan Klein,et al.  Measurement and Control of Ultra-Low Liquid Flowrates for Drug Delivery Application , 2008 .

[27]  Jan H. J. Fluitman,et al.  Micro-liquid flow sensor , 1993 .

[28]  Chia-Yen Lee,et al.  MEMS-based gas flow sensors , 2009 .

[29]  Renshi Sawada,et al.  Integrated Laser Doppler Blood Flowmeter Designed to Enable Wafer-Level Packaging , 2010, IEEE Transactions on Biomedical Engineering.

[30]  Liu,et al.  The Study of a Micro Channel Integrated Gas Flow Sensor , 2009 .

[31]  Mitsuhiro Shikida,et al.  A catheter-type flow sensor for measurement of aspirated- and inspired-air characteristics in the bronchial region , 2009 .

[32]  Renshi Sawada,et al.  An integrated laser blood flowmeter , 2003 .

[33]  M. Laghrouche,et al.  Low-cost embedded spirometer based on micro machined polycrystalline thin film , 2011 .

[34]  K. Katuri,et al.  Intraocular Pressure Monitoring Sensors , 2008, IEEE Sensors Journal.

[35]  Lennart Löfdahl,et al.  Silicon based flow sensors used for mean velocity and turbulence measurements , 1992 .

[36]  Chih-Ming Ho,et al.  A micromachined flow shear-stress sensor based on thermal transfer principles , 1999 .

[37]  Wan-Young Chung,et al.  Fabrication of clinical gas sensor using MEMS process , 2005 .

[38]  Yiannos Manoli,et al.  An invasive catheter flow sensor with on-chip CMOS readout electronics for the on-line determination of blood flow , 1996 .

[39]  Zhen Fang,et al.  A micro-wind sensor based on mechanical drag and thermal effects , 2009 .

[40]  F F de Mul,et al.  Mini laser-Doppler (blood) flow monitor with diode laser source and detection integrated in the probe. , 1984, Applied optics.

[41]  Andrea Scorza,et al.  Preliminary evaluation of a fiber-optic sensor for flow measurements in pulmonary ventilators , 2011, 2011 IEEE International Symposium on Medical Measurements and Applications.

[42]  Göran Stemme,et al.  A new silicon gas-flow sensor based on lift force , 1998 .

[43]  Chii-Wann Lin,et al.  Low Power Consumption Design of Micro-machined Thermal Sensor for Portable Spirometer , 2005 .

[44]  G. Stemme,et al.  An Integrated Pressure-flow Sensor For Correlation Measurements In Turbulent Gas Flows , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[45]  Hongyu Yu,et al.  MEMS shear stress sensors for microcirculation , 2005 .

[46]  Masayoshi Esashi,et al.  Ultra-miniature fiber-optic pressure sensor using white light interferometry , 2005 .

[47]  Nicholas A Peppas,et al.  Microfabricated drug delivery devices. , 2005, International journal of pharmaceutics.

[48]  Hyeun Joong Yoon,et al.  Micro devices for a cerebrospinal fluid (CSF) shunt system , 2004 .

[49]  V. Gass,et al.  Nanofluid handling by micro-flow-sensor based on drag force measurements , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[50]  Sergio Silvestri,et al.  Optical-Fiber Measurement Systems for Medical Applications , 2011 .

[51]  A.F.P. van Putten,et al.  An integrated silicon double bridge anemometer , 1983 .

[52]  M.J.A.M. van Putten,et al.  Multisensor microsystem for pulmonary function diagnostics , 2002 .

[53]  Peter D. Sly,et al.  Measurement of flow and volume , 1996 .

[54]  Patrick J. French,et al.  Multi-parameter sensor system with intravascular navigation for catheter/guide wire application , 2002 .

[55]  K. Wise,et al.  Micromachined Antenna Stents and Cuffs for Monitoring Intraluminal Pressure and Flow , 2006, Journal of Microelectromechanical Systems.

[56]  Göran Stemme,et al.  A lift-force flow sensor designed for acceleration insensitivity , 1998 .

[57]  Mitsuhiro Shikida,et al.  Fabrication of a stent-type thermal flow sensor for measuring nasal respiration , 2010 .

[58]  Jose Mireles,et al.  Micromachined sensor design for optical‐fiber flow measurement , 2005 .

[59]  M. Miravitlles,et al.  Difficulties in differential diagnosis of COPD and asthma in primary care. , 2012, The British journal of general practice : the journal of the Royal College of General Practitioners.

[60]  Takashi Kobayashi,et al.  The Prandtl micro flow sensor (PMFS): a novel silicon diaphragm capacitive sensor for flow velocity measurement , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[61]  Sergio Silvestri,et al.  A novel target-type low pressure drop bidirectional optoelectronic air flow sensor for infant artificial ventilation: measurement principle and static calibration. , 2011, The Review of scientific instruments.

[62]  Nam-Trung Nguyen,et al.  Micromachined flow sensors—a review , 1997, Flow Measurement and Instrumentation.

[63]  S. D. Rapoportt,et al.  Fabrication and testing of a microdynamic rotor for blood flow measurements , 1991 .

[64]  Atul Malhotra,et al.  Pathophysiology of adult obstructive sleep apnea. , 2008, Proceedings of the American Thoracic Society.

[65]  Yuhua Ma,et al.  AIR-FLOW SENSOR AND HUMIDITY SENSOR APPLICATION TO NEONATAL INFANT RESPIRATION MONITORING , 1995 .

[66]  G. Kaltsas,et al.  Gas flow meter for application in medical equipment for respiratory control: study of the housing , 2004 .

[67]  J Mühling,et al.  Endoscopy: a minimally invasive procedure for diagnosis and treatment of diseases of the salivary glands. Six years of practical experience. , 2004, The British journal of oral & maxillofacial surgery.

[68]  Imin Kao,et al.  Smart MEMS Flow Sensor: Theoretical Analysis and Experimental Characterization , 2007, IEEE Sensors Journal.

[69]  T. Desai,et al.  Microfabricated drug delivery systems: from particles to pores. , 2003, Advanced drug delivery reviews.

[70]  J. Engel,et al.  Two-Dimensional Micromachined Flow Sensor Array for Fluid Mechanics Studies , 2003 .

[71]  Remco J. Wiegerink,et al.  Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels , 2008 .

[72]  Pasqualina M. Sarro,et al.  Pressure, flow and oxygen saturation sensors on one chip for use in catheters , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[73]  Carles Cané,et al.  Multi-range silicon micromachined flow sensor , 2004 .

[74]  Chia-Ling Wei,et al.  A Novel MEMS Respiratory Flow Sensor , 2010, IEEE Sensors Journal.

[75]  Rob Legtenberg,et al.  Thermally Excited Resonating Membrane Mass Flow Sensor , 1989 .

[76]  Kofi A. A. Makinwa,et al.  A smart wind sensor using thermal sigma-delta modulation techniques , 2002 .

[77]  A.F.P. van Putten,et al.  A silicon bidirectional flow sensor for measuring respiratory flow , 1997, IEEE Transactions on Biomedical Engineering.

[78]  Roland Zengerle,et al.  Thermal flow sensors for MEMS spirometric devices , 2010 .

[79]  Yu-Chong Tai,et al.  Lightly-doped polysilicon bridge as a flow meter , 1988 .

[80]  W. Dötzel,et al.  Asymmetrical locations of heaters and sensors relative to each other using heater arrays: a novel method for designing multi-range electrocaloric mass-flow sensors , 1997 .

[81]  Roland Zengerle,et al.  Thermal flow sensors for MEMS spirometric devices , 2009 .