VLSI-NEMS chip for AFM data storage
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W. Häberle | M. Lutwyche | H. Rothuizen | R. Stutz | R. Widmer | G. Binnig | M. Despont | H. Rohrer | U. Drechsler | P. Vettiger | U. Dürig | U. Durig | J. Brugger | W. Haberle | J. Brugger | H. Rohrer
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