Parameters extraction for DRIE model

In this paper, a set of experiments were carried out to extraction the parameters of two-dimensional (2D) Bosch process simulator, DROPIE, from process parameters. These experiments were selected based on the response surface method (RSM). The experimental results were coupled with the DROPIE, and its simulation results agreed with fabrication results very well, in particular the effect of the relative duration of etching vs. deposition and sidewall profile control. This DRIE simulator is a versatile tool to predict and control the DRIE performance based on these input parameters which consistent with the actual process parameters

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