High Performance Matched-Mode Tuning Fork Gyroscope

This paper presents the perfect matched-mode operation of a type I non-degenerate z-axis tuning-fork gyroscope (i.e., 0 Hz frequency split between high-Q drive and sense modes). The matched-mode tuning fork gyroscope (M2-TFG) is fabricated on 50-µ m thick SOI substrate and displays an overall rate sensitivity of 24.2 mV/º/s. Allan Variance analysis of the mode-matched device demonstrates an angle random walk (ARW) of 0.045 º/√ hr and a measured bias instability of 0.96 º/hr. Temperature characterization of the M2-TFG verifies that mode matching is maintained over a temperature range of 20-100 ° C.