Exhaust Gas Oxygen Sensors Based on TiO 2 Films

This paper discusses the properties of EGO sensors based on thick Ti02 films. These devices are fabricated by depositing a Ti02 film on an insulating or conducting substrate. In addition to being inherently inexpensive, planar techniques provide flexibility in the fabrication of multicomponent structures incorporating temperature compensation and heating elements. Furthermore, Ti02 film sensors are found to possess faster transient response than available Zr02 and ceramic Ti02 sensors. Results of engine studies of the properties of these new Ti02 sensors will be presented and discussed.