论文信息 - Sputter damage in Si surface by low energy Ar+ ion bombardment - 字舞流文

Sputter damage in Si surface by low energy Ar+ ion bombardment

H. J. Kang | Hyung‐Ik Lee | D. Moon | D. W. Moon | Suhk Kun Oh | Hye Chung Shin | S. Oh | Hyung Ik Lee | Hyungik Lee

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