With the development of micro-nano lithography, nanomaterials are widely used in biological tissue engineering. The study of the mechanical properties and electrical coupling properties of the living cells and nanostructured substrates based on impedance spectroscopy and atomic force microscopy, which are great significance to the response of the living cells to the environment, the diagnosis of diseases and the construction of new implant tissue engineering. In this work, different cycle size cylindrical array structure were fabricated by electron-beam lithography (EBL) technology, they were used as the substrates for the living cells in vitro culture. After the cells adherent growth on the substrates, the impedance distribution of the cells on the substrates were measured and discussed subsequently. The electrical coupling properties between the living cells and the substrates of each cycle size were analyzed according to the impedance data, which laid a foundation for the studies on the safety of cells culture in vitro, the evaluation of cell growth environment quality, the early diagnosis of diseases, and the characterization of self-repair ability of the cell membrane.
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